JPS59136131A - スパツタリング装置 - Google Patents

スパツタリング装置

Info

Publication number
JPS59136131A
JPS59136131A JP896883A JP896883A JPS59136131A JP S59136131 A JPS59136131 A JP S59136131A JP 896883 A JP896883 A JP 896883A JP 896883 A JP896883 A JP 896883A JP S59136131 A JPS59136131 A JP S59136131A
Authority
JP
Japan
Prior art keywords
target
substrate
sputtering
film
anode electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP896883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS634450B2 (enrdf_load_stackoverflow
Inventor
Kazuhiro Kobayashi
和弘 小林
Masahiro Hayama
羽山　昌宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP896883A priority Critical patent/JPS59136131A/ja
Publication of JPS59136131A publication Critical patent/JPS59136131A/ja
Publication of JPS634450B2 publication Critical patent/JPS634450B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP896883A 1983-01-21 1983-01-21 スパツタリング装置 Granted JPS59136131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP896883A JPS59136131A (ja) 1983-01-21 1983-01-21 スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP896883A JPS59136131A (ja) 1983-01-21 1983-01-21 スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS59136131A true JPS59136131A (ja) 1984-08-04
JPS634450B2 JPS634450B2 (enrdf_load_stackoverflow) 1988-01-29

Family

ID=11707478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP896883A Granted JPS59136131A (ja) 1983-01-21 1983-01-21 スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS59136131A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375321U (enrdf_load_stackoverflow) * 1989-11-24 1991-07-29

Also Published As

Publication number Publication date
JPS634450B2 (enrdf_load_stackoverflow) 1988-01-29

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