JPS59126686A - リフトオフ法によるパタ−ン形成法 - Google Patents
リフトオフ法によるパタ−ン形成法Info
- Publication number
- JPS59126686A JPS59126686A JP58001184A JP118483A JPS59126686A JP S59126686 A JPS59126686 A JP S59126686A JP 58001184 A JP58001184 A JP 58001184A JP 118483 A JP118483 A JP 118483A JP S59126686 A JPS59126686 A JP S59126686A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cutting die
- coating layer
- deposited
- deposit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 22
- 230000007261 regionalization Effects 0.000 title 1
- 239000010410 layer Substances 0.000 claims abstract description 52
- 238000005520 cutting process Methods 0.000 claims abstract description 25
- 239000011247 coating layer Substances 0.000 claims abstract description 19
- 206010011224 Cough Diseases 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 14
- 230000010358 mechanical oscillation Effects 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 6
- 238000004080 punching Methods 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 241000981595 Zoysia japonica Species 0.000 description 2
- 208000031513 cyst Diseases 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- MYLBTCQBKAKUTJ-UHFFFAOYSA-N 7-methyl-6,8-bis(methylsulfanyl)pyrrolo[1,2-a]pyrazine Chemical compound C1=CN=CC2=C(SC)C(C)=C(SC)N21 MYLBTCQBKAKUTJ-UHFFFAOYSA-N 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001184A JPS59126686A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001184A JPS59126686A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59126686A true JPS59126686A (ja) | 1984-07-21 |
| JPS6317349B2 JPS6317349B2 (enrdf_load_stackoverflow) | 1988-04-13 |
Family
ID=11494361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58001184A Granted JPS59126686A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59126686A (enrdf_load_stackoverflow) |
-
1983
- 1983-01-10 JP JP58001184A patent/JPS59126686A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6317349B2 (enrdf_load_stackoverflow) | 1988-04-13 |
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