JPS59126233A - プリント板のスルーホール検査方法及びその装置 - Google Patents

プリント板のスルーホール検査方法及びその装置

Info

Publication number
JPS59126233A
JPS59126233A JP22836982A JP22836982A JPS59126233A JP S59126233 A JPS59126233 A JP S59126233A JP 22836982 A JP22836982 A JP 22836982A JP 22836982 A JP22836982 A JP 22836982A JP S59126233 A JPS59126233 A JP S59126233A
Authority
JP
Japan
Prior art keywords
light
hole
filter
defect
printed board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22836982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442622B2 (enrdf_load_stackoverflow
Inventor
Giichi Kakigi
柿木　義一
Kikuo Mita
三田　喜久夫
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22836982A priority Critical patent/JPS59126233A/ja
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/de
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59126233A publication Critical patent/JPS59126233A/ja
Publication of JPH0442622B2 publication Critical patent/JPH0442622B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22836982A 1982-11-30 1982-12-27 プリント板のスルーホール検査方法及びその装置 Granted JPS59126233A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22836982A JPS59126233A (ja) 1982-12-27 1982-12-27 プリント板のスルーホール検査方法及びその装置
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22836982A JPS59126233A (ja) 1982-12-27 1982-12-27 プリント板のスルーホール検査方法及びその装置

Publications (2)

Publication Number Publication Date
JPS59126233A true JPS59126233A (ja) 1984-07-20
JPH0442622B2 JPH0442622B2 (enrdf_load_stackoverflow) 1992-07-14

Family

ID=16875379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22836982A Granted JPS59126233A (ja) 1982-11-30 1982-12-27 プリント板のスルーホール検査方法及びその装置

Country Status (1)

Country Link
JP (1) JPS59126233A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0442622B2 (enrdf_load_stackoverflow) 1992-07-14

Similar Documents

Publication Publication Date Title
US4692690A (en) Pattern detecting apparatus
JPS6017044B2 (ja) 印刷配線板のパタ−ン検査装置
JPS6229737B2 (enrdf_load_stackoverflow)
KR910002268B1 (ko) 다층 프린트 배선 기판의 스루 홀 보이드의 검사 방법 및 그 장치
JPH011940A (ja) 多層プリント基板におけるスルーホールボイド検査方法とその装置
JPS59126233A (ja) プリント板のスルーホール検査方法及びその装置
JPS6061648A (ja) パタ−ン検出装置
JP2519363B2 (ja) プリント基板における配線パタ―ンの欠陥検査方法
JP3322521B2 (ja) プリント基板のパターン検査方法及び装置及びプリント基板の製造方法
JPH11191668A (ja) 集合基板およびその各分割部分の良否判別方法
JPH049252B2 (enrdf_load_stackoverflow)
JPS6145955A (ja) スル−ホ−ル検査法
JPS6085308A (ja) スル−ホ−ル欠陥検査法
JPS608705A (ja) パタ−ン検出装置
JPS63271144A (ja) プリント板スル−ホ−ルの検査装置
JPS59180315A (ja) スル−ホ−ル検査法
JPH04221747A (ja) スルーホール検査方法及び装置
JPS603507A (ja) 配線パタ−ン検出装置
JPS59126234A (ja) プリント板のスル−ホ−ル検査装置
JPH04254707A (ja) 板体の外観検査装置
JPS6060540A (ja) スル−ホ−ル検査装置
JPS59125694A (ja) プリント板のスル−ホ−ル検査装置
JPS59150328A (ja) スル−ホ−ル検査装置
JPH0723873B2 (ja) プリント基板における配線パターンの欠陥検出方法
JPH03188359A (ja) スルーホール検査装置