JPS59121832U - Vapor phase growth equipment - Google Patents

Vapor phase growth equipment

Info

Publication number
JPS59121832U
JPS59121832U JP1450983U JP1450983U JPS59121832U JP S59121832 U JPS59121832 U JP S59121832U JP 1450983 U JP1450983 U JP 1450983U JP 1450983 U JP1450983 U JP 1450983U JP S59121832 U JPS59121832 U JP S59121832U
Authority
JP
Japan
Prior art keywords
susceptor
vapor phase
phase growth
nozzle
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1450983U
Other languages
Japanese (ja)
Other versions
JPH0632676Y2 (en
Inventor
文健 三重野
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP1983014509U priority Critical patent/JPH0632676Y2/en
Publication of JPS59121832U publication Critical patent/JPS59121832U/en
Application granted granted Critical
Publication of JPH0632676Y2 publication Critical patent/JPH0632676Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は縦形気相成長装置の概略側面図（一部断面を含
む）、第２図は従来のサセプタ取付治具を示す断面図、
第３図は本発明の実施例のサセプタ取付治具を示す断面
図、第４図はもう−っの実施例のサセプタ取付治具を示
す断面図である。 １・・・ペルジャー、２・・・ノズル、３・・・サセプ
タ、４・・・基板、５・・・カバー、６・・・ＲＦ占イ
ル、７・・・サセプタ取付治具、８・・・ガス導入管、
９・・・ペディスクル、１０，１２．１３・・・押え。Fig. 1 is a schematic side view (including a partial cross section) of a vertical vapor phase growth apparatus, Fig. 2 is a sectional view showing a conventional susceptor mounting jig,
FIG. 3 is a sectional view showing a susceptor mounting jig according to an embodiment of the present invention, and FIG. 4 is a sectional view showing a susceptor mounting jig according to another embodiment. DESCRIPTION OF SYMBOLS 1... Pelger, 2... Nozzle, 3... Susceptor, 4... Board, 5... Cover, 6... RF probe, 7... Susceptor mounting jig, 8...・Gas introduction pipe,
9...Pedicle, 10,12.13...Presser foot.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一　　反応容器と、該反応容器の中央からガスを放射状
に噴出するノズルと、結晶を成長させるべき基板を載置
し該基板の加熱を補助するサセプタと、該サセプタを前
記ノズルの軸のまわりに回転可能に取り付ける治具と、
該サセプタを誘導加熱する高周波コイルとを含んで成る
気相成長装置において、前記サセプタ取付治具が、前記
ノズルから噴出されるガスの、該サセプタ取付治具と前
記サセプタとの接触面への廻り込みを防止する壁面を有
することを特徴とする気相成長装置。(1) a reaction vessel, a nozzle that ejects gas radially from the center of the reaction vessel, a susceptor on which a substrate on which a crystal is to be grown is placed and which assists in heating the substrate, and the susceptor placed around the axis of the nozzle; A jig to be rotatably attached,
In a vapor phase growth apparatus comprising a high-frequency coil for inductively heating the susceptor, the susceptor mounting jig is configured to direct gas ejected from the nozzle to a contact surface between the susceptor mounting jig and the susceptor. A vapor phase growth apparatus characterized by having a wall surface that prevents crowding.
JP1983014509U 1983-02-04 1983-02-04 Vapor phase growth equipment Expired - Lifetime JPH0632676Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983014509U JPH0632676Y2 (en) 1983-02-04 1983-02-04 Vapor phase growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983014509U JPH0632676Y2 (en) 1983-02-04 1983-02-04 Vapor phase growth equipment

Publications (2)

Publication Number Publication Date
JPS59121832U true JPS59121832U (en) 1984-08-16
JPH0632676Y2 JPH0632676Y2 (en) 1994-08-24

Family

ID=30145868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983014509U Expired - Lifetime JPH0632676Y2 (en) 1983-02-04 1983-02-04 Vapor phase growth equipment

Country Status (1)

Country Link
JP (1) JPH0632676Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010567A (en) * 1973-05-25 1975-02-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010567A (en) * 1973-05-25 1975-02-03

Also Published As

Publication number Publication date
JPH0632676Y2 (en) 1994-08-24

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