JPS59113179A - 真空蒸着装置およびそのスタ−トアツプ法 - Google Patents
真空蒸着装置およびそのスタ−トアツプ法Info
- Publication number
- JPS59113179A JPS59113179A JP22178382A JP22178382A JPS59113179A JP S59113179 A JPS59113179 A JP S59113179A JP 22178382 A JP22178382 A JP 22178382A JP 22178382 A JP22178382 A JP 22178382A JP S59113179 A JPS59113179 A JP S59113179A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- receiver
- oxide film
- molten metal
- level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 11
- 238000001771 vacuum deposition Methods 0.000 title claims description 7
- 238000001704 evaporation Methods 0.000 claims abstract description 45
- 230000008020 evaporation Effects 0.000 claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 238000007790 scraping Methods 0.000 claims abstract description 19
- 238000007740 vapor deposition Methods 0.000 claims abstract description 12
- 239000003575 carbonaceous material Substances 0.000 claims abstract description 10
- 238000004891 communication Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims abstract 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 abstract description 10
- 238000002844 melting Methods 0.000 abstract description 10
- 238000009835 boiling Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- -1 etc. are used Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22178382A JPS59113179A (ja) | 1982-12-20 | 1982-12-20 | 真空蒸着装置およびそのスタ−トアツプ法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22178382A JPS59113179A (ja) | 1982-12-20 | 1982-12-20 | 真空蒸着装置およびそのスタ−トアツプ法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59113179A true JPS59113179A (ja) | 1984-06-29 |
| JPH027397B2 JPH027397B2 (enrdf_load_stackoverflow) | 1990-02-16 |
Family
ID=16772128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22178382A Granted JPS59113179A (ja) | 1982-12-20 | 1982-12-20 | 真空蒸着装置およびそのスタ−トアツプ法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113179A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1967604A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with directional evaporation |
| US20130199447A1 (en) * | 2010-12-13 | 2013-08-08 | Posco | Continuous Coating Apparatus |
-
1982
- 1982-12-20 JP JP22178382A patent/JPS59113179A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1967604A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with directional evaporation |
| US20130199447A1 (en) * | 2010-12-13 | 2013-08-08 | Posco | Continuous Coating Apparatus |
| JP2013545900A (ja) * | 2010-12-13 | 2013-12-26 | ポスコ | 連続コーティング装置 |
| US9267203B2 (en) | 2010-12-13 | 2016-02-23 | Posco | Continuous coating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027397B2 (enrdf_load_stackoverflow) | 1990-02-16 |
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