JPS59113179A - Vacuum deposition device and start-up method thereof - Google Patents

Abstract

PURPOSE:To provide a vapor deposition device which coats continuously a long- sized material thereon with a metal and which has no oxide film on an evaporation surface by providing specifically a means for scrapping the oxide film of the molten metal for evaporation and an oxide film receiver made of a carbonaceous material with a heating mechanism. CONSTITUTION:A scraper bar 22 for scraping oxide film, a receiver 23 for the scraped oxide film, and a heater 24 for heating the receiver are provided in a crucible 5 for evaporation at the position higher than the level of the molten metal, for example, molten Zn 6 in the stage of vapor deposition. The crucible 5, the bar 22, the receiver 23 and a communication pipe 8 are heated to the m. p. of Zn or above and the bar 22 is placed in the position 22'. The inside of a vapor deposition chamber 4 is thereupon evacuated to rise the Zn 6 in a melting furnace 7 through the pipe 8 into the crucible and to maintain the level thereof at the level A in the crucible 5 and thereafter the bar 22 is moved right from the inside of the receiver 23' to the position of the receiver 23, thereby scraping the oxide film on the Zn 6. The level of the Zn 6 is then lowered to the level B in the stage of vapor deposition by a level adjuster 11, and the vapor deposition is started.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention involves continuously vacuum-depositing a metal coating on a long material such as a copper strip, and transferring the metal for evaporation from a molten metal tank under atmospheric pressure to an evaporation crucible in a vacuum deposition chamber. This article relates to a vacuum evaporation device that supplies water via a communicating tube, and its start-up method.

A conventional startup method will be explained with reference to FIGS. 1 and 2.

FIG. 1 shows a mode in which Zn is continuously deposited on a copper strip, and the steel strip 1 uncoiled from the uncoiler 2 passes through the differential pressure exhaust chamber group 5 and then into the vacuum deposition chamber 411? : Enter, Z on the front
n is vapor-deposited, and then passed through the outlet differential pressure exhaust chamber group 12 and wound with a coin 15Vc to become a product.

An evaporation crucible 5 is installed in the vacuum deposition chamber 4, and molten Zn6 for evaporation is held in the crucible 5. This molten Zn 6 is supplied from a melting furnace (that is, a molten metal tank) 7 located in the atmosphere at atmospheric pressure via a communication pipe 8. Evaporation crucible 5, communication pipe 8 and melting furnace 7
The VC is equipped with a heater 9.10, and the predetermined temperature 1
to heat Zn.

In addition, 11 is a level adjustment machine for raising or lowering the melting furnace 7 to maintain or change the Zn level in the evaporation crucible 5, and 14 is a seal roll provided in the differential pressure exhaust chamber group 5, 12. , 15 is an exhaust port provided in the same chamber group 5, 12, 16 is an exhaust port provided in the vacuum deposition chamber 4, 1
These exhaust ports 15, 16 are connected to a vacuum pump (not shown).

In this unconventional embodiment, as shown in the figure, oxidized Zn (scum) 17 floats on the surface of the bath molten Zn 6 in the evaporation crucible 5, causing a boiling phenomenon. When boiling occurs, droplet-shaped Zn is generated and adheres to the steel strip 1vc, deteriorating the condition of the steaming surface and impairing product value.

The reason why this oxidized Zn (scum) 17 is generated is as follows.
This is because the conventional startup method as shown in FIG. 2 has drawbacks.

That is, in FIG. 2, when the vapor deposition operation is temporarily stopped, it is necessary to lower the level of the melting furnace 7 and discharge the molten Zn 6 from the evaporation crucible 5. At this time, melted Zn
A part of it remains attached to the inner walls of the evaporation crucible 5 and the communication pipe 8. This remaining Zn20 is oxidized by oxidizing gas in the air or inert gas atmosphere, and the Zn20
A Zn oxide film 21 is formed on the surface of the .

When the next startup is performed in this state, molten Zn must be supplied from the melting furnace 7 to the evaporation crucible 5 through the communication pipe 8, so this passing molten Zn will cause adhesion to the communication pipe 8 and the evaporation crucible 5iC. Zn oxide film 21
is peeled off and floats as scum on the surface of the bath-molten Zn 6 in the evaporation crucible 5.

The present invention has been made to solve the above-mentioned drawbacks. (1) A metal coating is continuously vacuum-deposited on a long material such as a copper strip, and the metal for evaporation is deposited in a molten metal tank under atmospheric pressure. In a continuous vacuum evaporation apparatus in which the oxide film is supplied from the evaporation crucible in the vacuum evaporation chamber to the evaporation crucible in the vacuum evaporation chamber through a communicating pipe, a scraping means for scraping off the oxide film on the surface of the molten metal for evaporation is provided in the evaporation crucible, and the oxide film is scraped off by the scraping means. A continuous method characterized in that a receiver for receiving the oxidized film is provided above the level of the molten metal during vapor deposition, a mechanism is provided to heat the receiver, and the constituent material of the receiver is a carbonaceous material. Vacuum deposition equipment, (2)
When starting up the apparatus described in (1) above, the molten metal is once supplied to a level above the oxide film receptacle of the evaporation crucible circle by evacuating the vacuum evaporation chamber, and then the molten metal is removed by the scraping means. After scraping off the oxide film, the molten metal is lowered to the level at which it was deposited and the entire evaporation process is started f:
1. Hereinafter, the apparatus and method of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 5 is a diagram showing an embodiment of the apparatus and method of the present invention, in which the same reference numerals as in FIG. 1.2 indicate the same elements as in FIG. 1.2.

In FIG. 5, the melting furnace 7 is heated in advance to melt Zn for evaporation in the furnace.

On the other hand, inside the evaporation crucible 5, there is a sharp scraping rod 22 for scraping off the oxide film on the molten metal, a receiver 25 for the scraped oxide film,
A heater 24 is installed to heat the receiver 25, and the evaporation crucible 5, scraping rod 22, receiver 25, and communication tube 8 are heated to a temperature equal to or higher than the melting point of Zn. Also,
At this time, the scraping rod 22 is held at the position of the receiver 25' (in the figure,
22').

In this state, the vapor deposition chamber 4 is evacuated, and the molten Zn in the melting furnace 7 is
is raised through the communication pipe 8, and after the molten Zn bath m has risen to the level A of the evaporation crucible 5, it is moved to the position of the scraping @ 22'i receiver 25 held in the receiver 25', and the molten Zn is Scrape off the oxide film on top.

Next, the level of molten Zn is lowered by the level controller 11 to the level Bt during evaporation, and evaporation is started.

By this operation, the oxide film on the molten Zn is scraped off and collected in the receiver 25, so there is no oxide film on the evaporation surface and no abnormal boiling occurs.

Further, since the receiver 23 is made of a carbonaceous material, the oxide film 21 formed on the receiver 23 is
The action of the carbonaceous material of the receiver 25 which has been heated by VC is reduced and disappears by the reaction znO0C→zn↑0Co↑------0(1), so that the oxide film is is never accumulated.

The scraping rod 22 is not limited to the above-mentioned rod shape, but may also be a plate shape, and the material is preferably one that does not react with molten Zn and is heat resistant, such as a high melting point metal such as W, Mo, etc., A403,
Although oxides such as Zr01, carbonaceous materials, etc. are used, carbonaceous materials are most suitable in terms of fully promoting the reduction and removal of the oxide film by the receiver 23. In addition, the receiver 25 needs to be made of a carbonaceous material in order to reduce and remove the oxide film, and may be made of a carbonaceous material integrally with the evaporation crucible 5, and since the reduction reaction is a surface reaction. The receiver 25 may be lined with a carbonaceous material. Furthermore, the heater 24
W, Mo, graphite, etc. are suitable for use in a vacuum.

As detailed above, according to the device and method of the present invention,
During the vapor deposition operation, there is no oxide film on the molten metal of the evaporation crucible (ie, on the evaporation surface), so abnormal boiling does not occur and normal vapor deposition can be performed on the steel strip 1.

[Brief explanation of drawings]

1 and 2 are diagrams for explaining a conventional continuous vacuum evaporation apparatus and its start-up method, and FIG. 5 is a diagram for explaining an embodiment of the apparatus and method of the present invention. Sub-Agent 1) Meifuku Agent Ryo Hagiwara - Continued from page 1 0 Inventor Zenman Nakamura Mitsubishi Heavy Industries, Ltd. Hiroshima Research Center, 4-6-22 Kannon-Shinmachi, Nishi-ku, Hiroshima ■Applicant Date Shin Steel Co., Ltd. 3-4-1-391 Marunouchi, Chiyoda-ku, Tokyo =

Claims (2)

[Claims] (1) *A continuous vacuum system in which a metal coating is continuously vacuum-deposited on a long material such as an A-band, and the metal for evaporation is supplied from a molten metal tank ηλ under atmospheric pressure to an evaporation crucible in a vacuum deposition chamber through a communication pipe. In the vapor deposition apparatus, a scraping means for scraping off the oxide film on the surface of the molten metal for evaporation and a receiver for receiving the oxide film scraped off by the scraping means are provided in the evaporation crucible below the level of the molten metal during vapor deposition. 1. A continuous vacuum evaporation apparatus, characterized in that the receiver is provided above and has a mechanism for heating the receiver, and the constituent material of the receiver is a gold-carbonaceous material. (2) - Continuous vacuum evaporation equipment that continuously vacuum evaporates a metal coating onto a long material such as a belt, and supplies the evaporation metal from a molten metal tank under atmospheric pressure to an evaporation crucible in a vacuum evaporation chamber through a communicating pipe. In addition, a scraping means for scraping off the oxide film on the surface of the molten metal for evaporation and a receiver for receiving the oxide film scraped off by the scraping means are installed in the evaporation crucible to reduce the level of the molten metal during evaporation. At the start of the vacuum evaporation apparatus, the evaporation chamber is evacuated and the molten metal is temporarily heated inside the evaporation crucible. After supplying the molten metal to a level above the oxidation layer, the oxide film on the molten metal is scraped off by a scraping means, and then the molten metal is lowered to the level at the time of evaporation and evaporation of N is started. Start-up method for vacuum evaporation equipment.