JPS59105505A - 渦電流式位置検出器及びその製造方法 - Google Patents
渦電流式位置検出器及びその製造方法Info
- Publication number
- JPS59105505A JPS59105505A JP21604682A JP21604682A JPS59105505A JP S59105505 A JPS59105505 A JP S59105505A JP 21604682 A JP21604682 A JP 21604682A JP 21604682 A JP21604682 A JP 21604682A JP S59105505 A JPS59105505 A JP S59105505A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- synthetic resin
- spiral
- sheet
- eddy current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 20
- 239000000057 synthetic resin Substances 0.000 claims abstract description 20
- 239000004020 conductor Substances 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000001259 photo etching Methods 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000000523 sample Substances 0.000 abstract description 8
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 238000004070 electrodeposition Methods 0.000 abstract description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21604682A JPS59105505A (ja) | 1982-12-09 | 1982-12-09 | 渦電流式位置検出器及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21604682A JPS59105505A (ja) | 1982-12-09 | 1982-12-09 | 渦電流式位置検出器及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59105505A true JPS59105505A (ja) | 1984-06-18 |
JPH0522162B2 JPH0522162B2 (enrdf_load_stackoverflow) | 1993-03-26 |
Family
ID=16682425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21604682A Granted JPS59105505A (ja) | 1982-12-09 | 1982-12-09 | 渦電流式位置検出器及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59105505A (enrdf_load_stackoverflow) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003520949A (ja) * | 2000-01-20 | 2003-07-08 | ハイ スピード テック オイ リミテッド | 電気機械のロータの位置を決定する方法および位置センサ |
JP2007078558A (ja) * | 2005-09-15 | 2007-03-29 | Toshiba Corp | 移動距離計測装置および移動距離計測方法 |
JP2010117307A (ja) * | 2008-11-14 | 2010-05-27 | Jtekt Corp | 基板形センサ、変位センサ装置及び転がり軸受装置 |
JP2010175335A (ja) * | 2009-01-28 | 2010-08-12 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011133436A (ja) * | 2009-12-25 | 2011-07-07 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011137748A (ja) * | 2009-12-28 | 2011-07-14 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011149861A (ja) * | 2010-01-22 | 2011-08-04 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2014115128A (ja) * | 2012-12-07 | 2014-06-26 | Mitsubishi Heavy Ind Ltd | センサを備えた測定ツール |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278464A (en) * | 1976-02-16 | 1977-07-01 | Akebono Brake Ind | Probe for wear indicator |
JPS5360661A (en) * | 1976-11-12 | 1978-05-31 | Sakata Denki Kk | Apparatus for detecting depth of landslide level |
JPS5455463A (en) * | 1977-10-12 | 1979-05-02 | Shin Nippon Sokki Kk | Sensor |
JPS5684501A (en) * | 1979-11-15 | 1981-07-09 | Bosch Gmbh Robert | Measuring device for detecting distance between metallic surface and its opposite surface under nonncontact condition |
-
1982
- 1982-12-09 JP JP21604682A patent/JPS59105505A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278464A (en) * | 1976-02-16 | 1977-07-01 | Akebono Brake Ind | Probe for wear indicator |
JPS5360661A (en) * | 1976-11-12 | 1978-05-31 | Sakata Denki Kk | Apparatus for detecting depth of landslide level |
JPS5455463A (en) * | 1977-10-12 | 1979-05-02 | Shin Nippon Sokki Kk | Sensor |
JPS5684501A (en) * | 1979-11-15 | 1981-07-09 | Bosch Gmbh Robert | Measuring device for detecting distance between metallic surface and its opposite surface under nonncontact condition |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003520949A (ja) * | 2000-01-20 | 2003-07-08 | ハイ スピード テック オイ リミテッド | 電気機械のロータの位置を決定する方法および位置センサ |
JP2007078558A (ja) * | 2005-09-15 | 2007-03-29 | Toshiba Corp | 移動距離計測装置および移動距離計測方法 |
JP2010117307A (ja) * | 2008-11-14 | 2010-05-27 | Jtekt Corp | 基板形センサ、変位センサ装置及び転がり軸受装置 |
JP2010175335A (ja) * | 2009-01-28 | 2010-08-12 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011133436A (ja) * | 2009-12-25 | 2011-07-07 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011137748A (ja) * | 2009-12-28 | 2011-07-14 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2011149861A (ja) * | 2010-01-22 | 2011-08-04 | Jtekt Corp | 変位センサ装置及び転がり軸受装置 |
JP2014115128A (ja) * | 2012-12-07 | 2014-06-26 | Mitsubishi Heavy Ind Ltd | センサを備えた測定ツール |
Also Published As
Publication number | Publication date |
---|---|
JPH0522162B2 (enrdf_load_stackoverflow) | 1993-03-26 |
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