JPS59101619A - 光学装置 - Google Patents

光学装置

Info

Publication number
JPS59101619A
JPS59101619A JP57210912A JP21091282A JPS59101619A JP S59101619 A JPS59101619 A JP S59101619A JP 57210912 A JP57210912 A JP 57210912A JP 21091282 A JP21091282 A JP 21091282A JP S59101619 A JPS59101619 A JP S59101619A
Authority
JP
Japan
Prior art keywords
laser
pinhole
optical system
lens
afocal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57210912A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421845B2 (enExample
Inventor
Akiyoshi Suzuki
章義 鈴木
Hideki Ine
秀樹 稲
Kazuo Takahashi
一雄 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57210912A priority Critical patent/JPS59101619A/ja
Priority to US06/555,526 priority patent/US4621890A/en
Publication of JPS59101619A publication Critical patent/JPS59101619A/ja
Publication of JPH0421845B2 publication Critical patent/JPH0421845B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP57210912A 1982-12-01 1982-12-01 光学装置 Granted JPS59101619A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57210912A JPS59101619A (ja) 1982-12-01 1982-12-01 光学装置
US06/555,526 US4621890A (en) 1982-12-01 1983-11-28 Optical apparatus including two afocal systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57210912A JPS59101619A (ja) 1982-12-01 1982-12-01 光学装置

Publications (2)

Publication Number Publication Date
JPS59101619A true JPS59101619A (ja) 1984-06-12
JPH0421845B2 JPH0421845B2 (enExample) 1992-04-14

Family

ID=16597122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57210912A Granted JPS59101619A (ja) 1982-12-01 1982-12-01 光学装置

Country Status (2)

Country Link
US (1) US4621890A (enExample)
JP (1) JPS59101619A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001589A1 (en) * 2004-03-24 2006-01-05 Youk-Hoon Lee Steel-column pile recovery process and concrete pile and earth flow wall using the same

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4852983A (en) * 1987-09-21 1989-08-01 Spectra-Physics, Inc. Distance simulator
JPH0315018A (ja) * 1989-01-13 1991-01-23 Dainippon Screen Mfg Co Ltd 画像走査記録装置のレーザ露光装置
US5610753A (en) * 1991-12-12 1997-03-11 Eastman Kodak Company Optical design of laser scanner to reduce thermal sensitivity
DE69212579T2 (de) 1991-12-12 1997-03-06 Eastman Kodak Co Optische Vorrichtung eines Laser-Abtastgerätes zur Verringerung thermischer Empfindlichkeit
US6075912A (en) * 1998-03-17 2000-06-13 Polaroid Corporation Apparatus for coupling radiation beams into an optical waveguide
US6324320B1 (en) 1998-03-17 2001-11-27 Polaroid Corporation Optical apparatus for producing a high-brightness multi-laser radiation source
JP3316814B2 (ja) * 1998-08-11 2002-08-19 ペンタックス プレシジョン株式会社 光軸補正光学系
JP4136125B2 (ja) 1998-10-27 2008-08-20 キヤノン株式会社 プリント位置合わせ方法およびプリント装置
JP2000127370A (ja) 1998-10-27 2000-05-09 Canon Inc 光学センサの配置方法、当該光学センサを用いるプリント位置合わせ方法およびプリント装置
NL2003497A (en) * 2008-09-23 2010-03-24 Asml Netherlands Bv Lithographic system, lithographic method and device manufacturing method.
US7988306B2 (en) * 2008-10-02 2011-08-02 Eastman Kodak Company Afocal attachment for projection lens
KR100915858B1 (ko) * 2009-05-19 2009-09-07 국방과학연구소 주야간 조준 및 거리측정용 복합광학계

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146144A (enExample) * 1974-10-18 1976-04-20 Victor Company Of Japan

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3771850A (en) * 1971-08-04 1973-11-13 Ibm Scan angle multiplier of constant aperture
JPS593791B2 (ja) * 1975-04-07 1984-01-26 キヤノン株式会社 物体の像認識方法
GB1594966A (en) * 1977-06-01 1981-08-05 Pilkington Perkin Elmer Ltd Infra-red optical lens sytems
JPS5611427A (en) * 1979-07-10 1981-02-04 Canon Inc Variable power afocal lens system
US4346990A (en) * 1979-09-07 1982-08-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Scanning afocal laser velocimeter projection lens system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146144A (enExample) * 1974-10-18 1976-04-20 Victor Company Of Japan

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001589A1 (en) * 2004-03-24 2006-01-05 Youk-Hoon Lee Steel-column pile recovery process and concrete pile and earth flow wall using the same

Also Published As

Publication number Publication date
JPH0421845B2 (enExample) 1992-04-14
US4621890A (en) 1986-11-11

Similar Documents

Publication Publication Date Title
US6341901B1 (en) Photographing lens of a camera having a mask for blocking off noise light which generates in relation to a non-circular lens
JPS59101619A (ja) 光学装置
JPH0412039B2 (enExample)
JP3278277B2 (ja) 投影露光装置及びこれを用いたデバイス製造方法
JPS58152535A (ja) 合焦機能を有する光学装置
JPS60100114A (ja) 合焦検出装置
JPS5857385U (ja) レ−ザ照射装置
JP3402124B2 (ja) ビームホモジナイザ及び半導体薄膜作製方法
JP2580148B2 (ja) 光ミキサ−
JPS63114186A (ja) 照明装置
JPH08220432A (ja) 投影光学系および該光学系を備えた露光装置
JP3254939B2 (ja) 光通信用の光学装置
JPH02134259A (ja) 描画装置
JPS62123423A (ja) 照明光学系
JPH05333269A (ja) アフォーカル光学系
JP3048267B2 (ja) 顕微鏡光学系
DE69630997D1 (de) Autofokusvorrichtung
JPH0248090B2 (enExample)
JP3040054B2 (ja) 露光装置
CN215067713U (zh) 光刻设备的照明系统和光刻设备
KR102425179B1 (ko) 라인빔 형성장치
JP2000056380A (ja) 光学装置
KR0180856B1 (ko) 비 구면 집광 렌즈를 사용한 조명계
JP2002025933A (ja) ビームホモジナイザ及び半導体薄膜作製方法
JPH01109720A (ja) 照明装置