JPS5893340A - ウエハの搬送装置 - Google Patents

ウエハの搬送装置

Info

Publication number
JPS5893340A
JPS5893340A JP56193338A JP19333881A JPS5893340A JP S5893340 A JPS5893340 A JP S5893340A JP 56193338 A JP56193338 A JP 56193338A JP 19333881 A JP19333881 A JP 19333881A JP S5893340 A JPS5893340 A JP S5893340A
Authority
JP
Japan
Prior art keywords
wafer
fork
wafers
unprocessed
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56193338A
Other languages
English (en)
Japanese (ja)
Other versions
JPS618577B2 (enExample
Inventor
Hitoshi Ogi
尾木　斉
Etsuo Sakuma
佐久間　悦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP56193338A priority Critical patent/JPS5893340A/ja
Publication of JPS5893340A publication Critical patent/JPS5893340A/ja
Publication of JPS618577B2 publication Critical patent/JPS618577B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/7621—
    • H10P72/3222—
    • H10P72/3306—
    • H10P72/7618—

Landscapes

  • ing And Chemical Polishing (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP56193338A 1981-11-30 1981-11-30 ウエハの搬送装置 Granted JPS5893340A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56193338A JPS5893340A (ja) 1981-11-30 1981-11-30 ウエハの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56193338A JPS5893340A (ja) 1981-11-30 1981-11-30 ウエハの搬送装置

Publications (2)

Publication Number Publication Date
JPS5893340A true JPS5893340A (ja) 1983-06-03
JPS618577B2 JPS618577B2 (enExample) 1986-03-15

Family

ID=16306226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56193338A Granted JPS5893340A (ja) 1981-11-30 1981-11-30 ウエハの搬送装置

Country Status (1)

Country Link
JP (1) JPS5893340A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置

Also Published As

Publication number Publication date
JPS618577B2 (enExample) 1986-03-15

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