JPS618577B2 - - Google Patents
Info
- Publication number
- JPS618577B2 JPS618577B2 JP56193338A JP19333881A JPS618577B2 JP S618577 B2 JPS618577 B2 JP S618577B2 JP 56193338 A JP56193338 A JP 56193338A JP 19333881 A JP19333881 A JP 19333881A JP S618577 B2 JPS618577 B2 JP S618577B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/7621—
-
- H10P72/3222—
-
- H10P72/3306—
-
- H10P72/7618—
Landscapes
- ing And Chemical Polishing (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56193338A JPS5893340A (ja) | 1981-11-30 | 1981-11-30 | ウエハの搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56193338A JPS5893340A (ja) | 1981-11-30 | 1981-11-30 | ウエハの搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5893340A JPS5893340A (ja) | 1983-06-03 |
| JPS618577B2 true JPS618577B2 (enExample) | 1986-03-15 |
Family
ID=16306226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56193338A Granted JPS5893340A (ja) | 1981-11-30 | 1981-11-30 | ウエハの搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5893340A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5895636U (ja) * | 1981-12-22 | 1983-06-29 | キヤノン株式会社 | ウエハ等の搬出入装置 |
-
1981
- 1981-11-30 JP JP56193338A patent/JPS5893340A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5893340A (ja) | 1983-06-03 |