JPS5892201A - 薄膜白金温度センサ - Google Patents

薄膜白金温度センサ

Info

Publication number
JPS5892201A
JPS5892201A JP56191495A JP19149581A JPS5892201A JP S5892201 A JPS5892201 A JP S5892201A JP 56191495 A JP56191495 A JP 56191495A JP 19149581 A JP19149581 A JP 19149581A JP S5892201 A JPS5892201 A JP S5892201A
Authority
JP
Japan
Prior art keywords
platinum
thin film
temperature sensor
protective film
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56191495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335084B2 (OSRAM
Inventor
和久 松本
一雄 緒方
邦宏 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56191495A priority Critical patent/JPS5892201A/ja
Publication of JPS5892201A publication Critical patent/JPS5892201A/ja
Publication of JPS6335084B2 publication Critical patent/JPS6335084B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP56191495A 1981-11-27 1981-11-27 薄膜白金温度センサ Granted JPS5892201A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56191495A JPS5892201A (ja) 1981-11-27 1981-11-27 薄膜白金温度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56191495A JPS5892201A (ja) 1981-11-27 1981-11-27 薄膜白金温度センサ

Publications (2)

Publication Number Publication Date
JPS5892201A true JPS5892201A (ja) 1983-06-01
JPS6335084B2 JPS6335084B2 (OSRAM) 1988-07-13

Family

ID=16275587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56191495A Granted JPS5892201A (ja) 1981-11-27 1981-11-27 薄膜白金温度センサ

Country Status (1)

Country Link
JP (1) JPS5892201A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6140513A (ja) * 1984-08-01 1986-02-26 Hitachi Ltd 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子
JPS61148732A (ja) * 1984-12-21 1986-07-07 エヌオーケー株式会社 感温素子
JPS61181104A (ja) * 1985-02-06 1986-08-13 シャープ株式会社 白金測温抵抗体
JPH01500629A (ja) * 1986-02-13 1989-03-01 ロ−ズマウント　インコ 高温拡散隔壁を有する薄いフィルム状の白金抵抗温度計
JPH07167715A (ja) * 1993-08-26 1995-07-04 Siemens Matsushita Components Gmbh & Co Kg 複合サーミスタ温度センサ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104063A (en) * 1976-02-27 1977-09-01 Hitachi Ltd Production of surface protection film in electronic parts
JPS52116076A (en) * 1976-03-26 1977-09-29 Hitachi Ltd Preparation of film for protecting surface of electronic parts
JPS5355992A (en) * 1976-10-29 1978-05-20 Nec Corp Semiconductor device
JPS54107759A (en) * 1978-02-10 1979-08-23 Matsushita Electric Ind Co Ltd Temperature-humidity sensor
JPS56134702A (en) * 1980-02-29 1981-10-21 Leeds & Northrup Co Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104063A (en) * 1976-02-27 1977-09-01 Hitachi Ltd Production of surface protection film in electronic parts
JPS52116076A (en) * 1976-03-26 1977-09-29 Hitachi Ltd Preparation of film for protecting surface of electronic parts
JPS5355992A (en) * 1976-10-29 1978-05-20 Nec Corp Semiconductor device
JPS54107759A (en) * 1978-02-10 1979-08-23 Matsushita Electric Ind Co Ltd Temperature-humidity sensor
JPS56134702A (en) * 1980-02-29 1981-10-21 Leeds & Northrup Co Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6140513A (ja) * 1984-08-01 1986-02-26 Hitachi Ltd 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子
JPS61148732A (ja) * 1984-12-21 1986-07-07 エヌオーケー株式会社 感温素子
JPS61181104A (ja) * 1985-02-06 1986-08-13 シャープ株式会社 白金測温抵抗体
JPH01500629A (ja) * 1986-02-13 1989-03-01 ロ−ズマウント　インコ 高温拡散隔壁を有する薄いフィルム状の白金抵抗温度計
JPH07167715A (ja) * 1993-08-26 1995-07-04 Siemens Matsushita Components Gmbh & Co Kg 複合サーミスタ温度センサ

Also Published As

Publication number Publication date
JPS6335084B2 (OSRAM) 1988-07-13

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