JPS5885568A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5885568A
JPS5885568A JP56183395A JP18339581A JPS5885568A JP S5885568 A JPS5885568 A JP S5885568A JP 56183395 A JP56183395 A JP 56183395A JP 18339581 A JP18339581 A JP 18339581A JP S5885568 A JPS5885568 A JP S5885568A
Authority
JP
Japan
Prior art keywords
film
layer
wiring pattern
gate electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56183395A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257266B2 (enrdf_load_stackoverflow
Inventor
Koichiro Kotani
小谷　紘一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56183395A priority Critical patent/JPS5885568A/ja
Publication of JPS5885568A publication Critical patent/JPS5885568A/ja
Publication of JPS6257266B2 publication Critical patent/JPS6257266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP56183395A 1981-11-16 1981-11-16 半導体装置の製造方法 Granted JPS5885568A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56183395A JPS5885568A (ja) 1981-11-16 1981-11-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56183395A JPS5885568A (ja) 1981-11-16 1981-11-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5885568A true JPS5885568A (ja) 1983-05-21
JPS6257266B2 JPS6257266B2 (enrdf_load_stackoverflow) 1987-11-30

Family

ID=16135021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56183395A Granted JPS5885568A (ja) 1981-11-16 1981-11-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5885568A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024065A (ja) * 1983-07-20 1985-02-06 Agency Of Ind Science & Technol 電界効果トランジスタの製造方法
JP2006246859A (ja) * 2005-03-14 2006-09-21 Yanmar Co Ltd 乗用田植機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024065A (ja) * 1983-07-20 1985-02-06 Agency Of Ind Science & Technol 電界効果トランジスタの製造方法
JP2006246859A (ja) * 2005-03-14 2006-09-21 Yanmar Co Ltd 乗用田植機

Also Published As

Publication number Publication date
JPS6257266B2 (enrdf_load_stackoverflow) 1987-11-30

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