JPS6257266B2 - - Google Patents
Info
- Publication number
- JPS6257266B2 JPS6257266B2 JP56183395A JP18339581A JPS6257266B2 JP S6257266 B2 JPS6257266 B2 JP S6257266B2 JP 56183395 A JP56183395 A JP 56183395A JP 18339581 A JP18339581 A JP 18339581A JP S6257266 B2 JPS6257266 B2 JP S6257266B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- mask
- film
- forming
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56183395A JPS5885568A (ja) | 1981-11-16 | 1981-11-16 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56183395A JPS5885568A (ja) | 1981-11-16 | 1981-11-16 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5885568A JPS5885568A (ja) | 1983-05-21 |
| JPS6257266B2 true JPS6257266B2 (enrdf_load_stackoverflow) | 1987-11-30 |
Family
ID=16135021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56183395A Granted JPS5885568A (ja) | 1981-11-16 | 1981-11-16 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5885568A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024065A (ja) * | 1983-07-20 | 1985-02-06 | Agency Of Ind Science & Technol | 電界効果トランジスタの製造方法 |
| JP2006246859A (ja) * | 2005-03-14 | 2006-09-21 | Yanmar Co Ltd | 乗用田植機 |
-
1981
- 1981-11-16 JP JP56183395A patent/JPS5885568A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5885568A (ja) | 1983-05-21 |
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