JPS5884403A - 薄膜サ−ミスタの製造方法 - Google Patents
薄膜サ−ミスタの製造方法Info
- Publication number
- JPS5884403A JPS5884403A JP18206281A JP18206281A JPS5884403A JP S5884403 A JPS5884403 A JP S5884403A JP 18206281 A JP18206281 A JP 18206281A JP 18206281 A JP18206281 A JP 18206281A JP S5884403 A JPS5884403 A JP S5884403A
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- film
- sub
- thermistor
- insulating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 16
- 239000010408 film Substances 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 25
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18206281A JPS5884403A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18206281A JPS5884403A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5884403A true JPS5884403A (ja) | 1983-05-20 |
| JPS6252925B2 JPS6252925B2 (enrdf_load_stackoverflow) | 1987-11-07 |
Family
ID=16111671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18206281A Granted JPS5884403A (ja) | 1981-11-12 | 1981-11-12 | 薄膜サ−ミスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5884403A (enrdf_load_stackoverflow) |
-
1981
- 1981-11-12 JP JP18206281A patent/JPS5884403A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6252925B2 (enrdf_load_stackoverflow) | 1987-11-07 |
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