JPS5876139A - 気相成長方法 - Google Patents

気相成長方法

Info

Publication number
JPS5876139A
JPS5876139A JP17464681A JP17464681A JPS5876139A JP S5876139 A JPS5876139 A JP S5876139A JP 17464681 A JP17464681 A JP 17464681A JP 17464681 A JP17464681 A JP 17464681A JP S5876139 A JPS5876139 A JP S5876139A
Authority
JP
Japan
Prior art keywords
gas
replenishment
vapor phase
heating table
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17464681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225747B2 (https=
Inventor
Takashi Aoyama
隆 青山
Takaya Suzuki
誉也 鈴木
Hironori Inoue
洋典 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17464681A priority Critical patent/JPS5876139A/ja
Publication of JPS5876139A publication Critical patent/JPS5876139A/ja
Publication of JPS6225747B2 publication Critical patent/JPS6225747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP17464681A 1981-11-02 1981-11-02 気相成長方法 Granted JPS5876139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17464681A JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17464681A JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Publications (2)

Publication Number Publication Date
JPS5876139A true JPS5876139A (ja) 1983-05-09
JPS6225747B2 JPS6225747B2 (https=) 1987-06-04

Family

ID=15982227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17464681A Granted JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Country Status (1)

Country Link
JP (1) JPS5876139A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178374U (ja) * 1983-05-16 1984-11-29 沖電気工業株式会社 化学気相成長装置
JPS59178373U (ja) * 1983-05-14 1984-11-29 沖電気工業株式会社 化学気相成長装置
JP2010010588A (ja) * 2008-06-30 2010-01-14 Stanley Electric Co Ltd 素子の製造方法および成膜装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834926U (https=) * 1971-08-26 1973-04-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834926U (https=) * 1971-08-26 1973-04-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178373U (ja) * 1983-05-14 1984-11-29 沖電気工業株式会社 化学気相成長装置
JPS59178374U (ja) * 1983-05-16 1984-11-29 沖電気工業株式会社 化学気相成長装置
JP2010010588A (ja) * 2008-06-30 2010-01-14 Stanley Electric Co Ltd 素子の製造方法および成膜装置

Also Published As

Publication number Publication date
JPS6225747B2 (https=) 1987-06-04

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