JPS5873949A - 走査電子顕微鏡の倍率表示装置 - Google Patents

走査電子顕微鏡の倍率表示装置

Info

Publication number
JPS5873949A
JPS5873949A JP56171387A JP17138781A JPS5873949A JP S5873949 A JPS5873949 A JP S5873949A JP 56171387 A JP56171387 A JP 56171387A JP 17138781 A JP17138781 A JP 17138781A JP S5873949 A JPS5873949 A JP S5873949A
Authority
JP
Japan
Prior art keywords
magnification
display
circuit
deflection
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56171387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6363111B2 (enExample
Inventor
Osamu Yamada
理 山田
Hideo Arai
秀雄 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Science Systems Ltd
Original Assignee
Hitachi Ltd
Hitachi Measurement Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Measurement Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP56171387A priority Critical patent/JPS5873949A/ja
Publication of JPS5873949A publication Critical patent/JPS5873949A/ja
Publication of JPS6363111B2 publication Critical patent/JPS6363111B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56171387A 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置 Granted JPS5873949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171387A JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171387A JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Publications (2)

Publication Number Publication Date
JPS5873949A true JPS5873949A (ja) 1983-05-04
JPS6363111B2 JPS6363111B2 (enExample) 1988-12-06

Family

ID=15922215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171387A Granted JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Country Status (1)

Country Link
JP (1) JPS5873949A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012015029A (ja) * 2010-07-02 2012-01-19 Keyence Corp 拡大観察装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55130055A (en) * 1979-03-30 1980-10-08 Jeol Ltd Scanning electron microscope
JPS5635362A (en) * 1979-08-31 1981-04-08 Jeol Ltd Scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55130055A (en) * 1979-03-30 1980-10-08 Jeol Ltd Scanning electron microscope
JPS5635362A (en) * 1979-08-31 1981-04-08 Jeol Ltd Scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012015029A (ja) * 2010-07-02 2012-01-19 Keyence Corp 拡大観察装置

Also Published As

Publication number Publication date
JPS6363111B2 (enExample) 1988-12-06

Similar Documents

Publication Publication Date Title
US8304722B2 (en) Charged particle beam equipment and charged particle microscopy
US2621292A (en) Electrical integrating circuit arrangement
JP4231798B2 (ja) 荷電粒子線装置および倍率計測法
EP0700208A2 (en) Automatic brightness contrast lighting circuits and luminance/color difference signal processor and video display apparatus comprising the same
JPS5873949A (ja) 走査電子顕微鏡の倍率表示装置
JPS60261264A (ja) デジタル画像補正装置
US2539971A (en) Oscillographic voltage measuring device
US4006357A (en) Apparatus for displaying image of specimen
US4104566A (en) Analog correction system
Smith et al. Cathode-ray tube for recording high-speed transients
US1977999A (en) Cathode ray oscillograph
EP0089505B1 (en) Crt deflection distortion correcting circuit
JP2000311644A (ja) 走査型顕微鏡
US2224587A (en) Method of operating cathode ray tubes
JPH0572311A (ja) 電力計の校正方法
GB2064925A (en) Image pickup device
JPS5820192B2 (ja) コンバ−ジエンス制御装置
JPS63200450A (ja) 荷電ビ−ムの自動制御装置
JPS5921163B2 (ja) デンシビ−ムロコウソウチ
US3518481A (en) Cathode-ray tube linearity corrector
KR100351384B1 (ko) 전자 포커스회로
GB1569299A (en) For use in the method method of producing a scanning electron microscope image having reduced distortion and scanning electron microscopes
JPS5824726B2 (ja) 走査型測長装置
JP2003523530A (ja) 逆ビーム電流補償を有するシャドウマスクなしトラッキング陰極線管の制御回路
SU901984A1 (ru) Устройство дл фотопечатани