JPS5870439A - 研摩盤 - Google Patents
研摩盤Info
- Publication number
- JPS5870439A JPS5870439A JP16788481A JP16788481A JPS5870439A JP S5870439 A JPS5870439 A JP S5870439A JP 16788481 A JP16788481 A JP 16788481A JP 16788481 A JP16788481 A JP 16788481A JP S5870439 A JPS5870439 A JP S5870439A
- Authority
- JP
- Japan
- Prior art keywords
- bits
- polishing
- polishing machine
- grinder
- embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 240000002834 Paulownia tomentosa Species 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 14
- 229910003460 diamond Inorganic materials 0.000 abstract description 10
- 239000010432 diamond Substances 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 8
- 229910052759 nickel Inorganic materials 0.000 abstract description 7
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 239000000843 powder Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 239000010419 fine particle Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 241001070941 Castanea Species 0.000 description 1
- 235000014036 Castanea Nutrition 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B3/00—Recording by mechanical cutting, deforming or pressing, e.g. of grooves or pits; Reproducing by mechanical sensing; Record carriers therefor
- G11B3/44—Styli, e.g. sapphire, diamond
- G11B3/56—Sharpening
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16788481A JPS5870439A (ja) | 1981-10-22 | 1981-10-22 | 研摩盤 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16788481A JPS5870439A (ja) | 1981-10-22 | 1981-10-22 | 研摩盤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5870439A true JPS5870439A (ja) | 1983-04-26 |
| JPS6160490B2 JPS6160490B2 (enExample) | 1986-12-20 |
Family
ID=15857858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16788481A Granted JPS5870439A (ja) | 1981-10-22 | 1981-10-22 | 研摩盤 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5870439A (enExample) |
-
1981
- 1981-10-22 JP JP16788481A patent/JPS5870439A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6160490B2 (enExample) | 1986-12-20 |
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