JPS5870109A - 組立精度測定装置 - Google Patents

組立精度測定装置

Info

Publication number
JPS5870109A
JPS5870109A JP16817281A JP16817281A JPS5870109A JP S5870109 A JPS5870109 A JP S5870109A JP 16817281 A JP16817281 A JP 16817281A JP 16817281 A JP16817281 A JP 16817281A JP S5870109 A JPS5870109 A JP S5870109A
Authority
JP
Japan
Prior art keywords
head
light
scattered
detection system
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16817281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Akira Ono
明 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16817281A priority Critical patent/JPS5870109A/ja
Publication of JPS5870109A publication Critical patent/JPS5870109A/ja
Publication of JPS6230566B2 publication Critical patent/JPS6230566B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16817281A 1981-10-21 1981-10-21 組立精度測定装置 Granted JPS5870109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16817281A JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16817281A JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Publications (2)

Publication Number Publication Date
JPS5870109A true JPS5870109A (ja) 1983-04-26
JPS6230566B2 JPS6230566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-03

Family

ID=15863130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16817281A Granted JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Country Status (1)

Country Link
JP (1) JPS5870109A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6230566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-03

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