JPS6230566B2 - - Google Patents

Info

Publication number
JPS6230566B2
JPS6230566B2 JP16817281A JP16817281A JPS6230566B2 JP S6230566 B2 JPS6230566 B2 JP S6230566B2 JP 16817281 A JP16817281 A JP 16817281A JP 16817281 A JP16817281 A JP 16817281A JP S6230566 B2 JPS6230566 B2 JP S6230566B2
Authority
JP
Japan
Prior art keywords
light
detection system
scattered
optical path
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16817281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5870109A (ja
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16817281A priority Critical patent/JPS5870109A/ja
Publication of JPS5870109A publication Critical patent/JPS5870109A/ja
Publication of JPS6230566B2 publication Critical patent/JPS6230566B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16817281A 1981-10-21 1981-10-21 組立精度測定装置 Granted JPS5870109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16817281A JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16817281A JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Publications (2)

Publication Number Publication Date
JPS5870109A JPS5870109A (ja) 1983-04-26
JPS6230566B2 true JPS6230566B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-03

Family

ID=15863130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16817281A Granted JPS5870109A (ja) 1981-10-21 1981-10-21 組立精度測定装置

Country Status (1)

Country Link
JP (1) JPS5870109A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5870109A (ja) 1983-04-26

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