JPH0331367B2 - - Google Patents
Info
- Publication number
- JPH0331367B2 JPH0331367B2 JP58166320A JP16632083A JPH0331367B2 JP H0331367 B2 JPH0331367 B2 JP H0331367B2 JP 58166320 A JP58166320 A JP 58166320A JP 16632083 A JP16632083 A JP 16632083A JP H0331367 B2 JPH0331367 B2 JP H0331367B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light
- reflected light
- displacement
- measurement target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16632083A JPS6057202A (ja) | 1983-09-09 | 1983-09-09 | 光学式表面変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16632083A JPS6057202A (ja) | 1983-09-09 | 1983-09-09 | 光学式表面変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057202A JPS6057202A (ja) | 1985-04-03 |
| JPH0331367B2 true JPH0331367B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-02 |
Family
ID=15829163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16632083A Granted JPS6057202A (ja) | 1983-09-09 | 1983-09-09 | 光学式表面変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057202A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100817801B1 (ko) * | 2000-08-03 | 2008-03-31 | 소니 가부시끼 가이샤 | 고체 촬상 장치 및 카메라 시스템 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981585A (zh) * | 2017-06-01 | 2018-12-11 | 上海砺晟光电技术有限公司 | 可精确测量曲面目标位移的激光位移传感器 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5819964B2 (ja) * | 1975-12-02 | 1983-04-21 | セイコーインスツルメンツ株式会社 | コウデンシキソツキヨホウホウ |
| JPS57161608A (en) * | 1981-03-31 | 1982-10-05 | Anritsu Corp | Measuring device for object size |
-
1983
- 1983-09-09 JP JP16632083A patent/JPS6057202A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100817801B1 (ko) * | 2000-08-03 | 2008-03-31 | 소니 가부시끼 가이샤 | 고체 촬상 장치 및 카메라 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6057202A (ja) | 1985-04-03 |