JPS586535Y2 - 回転式塗布装置 - Google Patents

回転式塗布装置

Info

Publication number
JPS586535Y2
JPS586535Y2 JP1977112862U JP11286277U JPS586535Y2 JP S586535 Y2 JPS586535 Y2 JP S586535Y2 JP 1977112862 U JP1977112862 U JP 1977112862U JP 11286277 U JP11286277 U JP 11286277U JP S586535 Y2 JPS586535 Y2 JP S586535Y2
Authority
JP
Japan
Prior art keywords
mask substrate
rotary coating
coating device
spinner head
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977112862U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440071U (enrdf_load_stackoverflow
Inventor
小二郎 数金
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1977112862U priority Critical patent/JPS586535Y2/ja
Publication of JPS5440071U publication Critical patent/JPS5440071U/ja
Application granted granted Critical
Publication of JPS586535Y2 publication Critical patent/JPS586535Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1977112862U 1977-08-25 1977-08-25 回転式塗布装置 Expired JPS586535Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977112862U JPS586535Y2 (ja) 1977-08-25 1977-08-25 回転式塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977112862U JPS586535Y2 (ja) 1977-08-25 1977-08-25 回転式塗布装置

Publications (2)

Publication Number Publication Date
JPS5440071U JPS5440071U (enrdf_load_stackoverflow) 1979-03-16
JPS586535Y2 true JPS586535Y2 (ja) 1983-02-04

Family

ID=29062113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977112862U Expired JPS586535Y2 (ja) 1977-08-25 1977-08-25 回転式塗布装置

Country Status (1)

Country Link
JP (1) JPS586535Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725616Y2 (enrdf_load_stackoverflow) * 1979-06-22 1982-06-03

Also Published As

Publication number Publication date
JPS5440071U (enrdf_load_stackoverflow) 1979-03-16

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