JPS5847825B2 - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS5847825B2
JPS5847825B2 JP51102218A JP10221876A JPS5847825B2 JP S5847825 B2 JPS5847825 B2 JP S5847825B2 JP 51102218 A JP51102218 A JP 51102218A JP 10221876 A JP10221876 A JP 10221876A JP S5847825 B2 JPS5847825 B2 JP S5847825B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
irradiation
aperture
object plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51102218A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5230154A (en
Inventor
カレル・デイーデリツク・ヴアン・デル・マスト
ヤン・バルト・レ・ポーレ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS5230154A publication Critical patent/JPS5230154A/ja
Publication of JPS5847825B2 publication Critical patent/JPS5847825B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP51102218A 1975-09-01 1976-08-28 電子顕微鏡 Expired JPS5847825B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7510276A NL7510276A (nl) 1975-09-01 1975-09-01 Elektronenmikroskoop.

Publications (2)

Publication Number Publication Date
JPS5230154A JPS5230154A (en) 1977-03-07
JPS5847825B2 true JPS5847825B2 (ja) 1983-10-25

Family

ID=19824390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51102218A Expired JPS5847825B2 (ja) 1975-09-01 1976-08-28 電子顕微鏡

Country Status (6)

Country Link
JP (1) JPS5847825B2 (https=)
CA (1) CA1061477A (https=)
DE (1) DE2637753A1 (https=)
FR (1) FR2322452A1 (https=)
GB (1) GB1563014A (https=)
NL (1) NL7510276A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE69939309D1 (de) 1999-03-31 2008-09-25 Advantest Corp Teilchenstrahlgerät zur schrägen Beobachtung einer Probe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1073655B (de) * 1958-11-29 1960-01-21 Fa. Carl Zeiss, Heidenheim/Brenz Verfahren zum Ändern der Bildhelligkeit in Korpuskularstrahlgeräten, insbesondere in Elektronenmikroskopen
JPS5623272B2 (https=) * 1973-11-19 1981-05-29

Also Published As

Publication number Publication date
CA1061477A (en) 1979-08-28
NL7510276A (nl) 1977-03-03
GB1563014A (en) 1980-03-19
FR2322452A1 (fr) 1977-03-25
DE2637753A1 (de) 1977-03-03
JPS5230154A (en) 1977-03-07
FR2322452B1 (https=) 1980-12-12

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