GB1563014A - Electron microscope - Google Patents
Electron microscope Download PDFInfo
- Publication number
- GB1563014A GB1563014A GB3573076A GB3573076A GB1563014A GB 1563014 A GB1563014 A GB 1563014A GB 3573076 A GB3573076 A GB 3573076A GB 3573076 A GB3573076 A GB 3573076A GB 1563014 A GB1563014 A GB 1563014A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron
- deflection
- axis
- electron beam
- illuminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 63
- 230000010354 integration Effects 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 8
- 230000004075 alteration Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000000875 corresponding effect Effects 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7510276A NL7510276A (nl) | 1975-09-01 | 1975-09-01 | Elektronenmikroskoop. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1563014A true GB1563014A (en) | 1980-03-19 |
Family
ID=19824390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3573076A Expired GB1563014A (en) | 1975-09-01 | 1976-08-27 | Electron microscope |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5847825B2 (https=) |
| CA (1) | CA1061477A (https=) |
| DE (1) | DE2637753A1 (https=) |
| FR (1) | FR2322452A1 (https=) |
| GB (1) | GB1563014A (https=) |
| NL (1) | NL7510276A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1049131A1 (en) | 1999-03-31 | 2000-11-02 | Advantest Corporation | Particle beam apparatus for tilted observation of a specimen |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7804038A (nl) * | 1978-04-17 | 1979-10-19 | Philips Nv | Elektronenmikroskoop. |
| JPS55121259A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Elelctron microscope |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1073655B (de) * | 1958-11-29 | 1960-01-21 | Fa. Carl Zeiss, Heidenheim/Brenz | Verfahren zum Ändern der Bildhelligkeit in Korpuskularstrahlgeräten, insbesondere in Elektronenmikroskopen |
| JPS5623272B2 (https=) * | 1973-11-19 | 1981-05-29 |
-
1975
- 1975-09-01 NL NL7510276A patent/NL7510276A/xx not_active Application Discontinuation
-
1976
- 1976-08-21 DE DE19762637753 patent/DE2637753A1/de not_active Ceased
- 1976-08-26 CA CA259,926A patent/CA1061477A/en not_active Expired
- 1976-08-27 GB GB3573076A patent/GB1563014A/en not_active Expired
- 1976-08-28 JP JP51102218A patent/JPS5847825B2/ja not_active Expired
- 1976-09-01 FR FR7626413A patent/FR2322452A1/fr active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1049131A1 (en) | 1999-03-31 | 2000-11-02 | Advantest Corporation | Particle beam apparatus for tilted observation of a specimen |
Also Published As
| Publication number | Publication date |
|---|---|
| CA1061477A (en) | 1979-08-28 |
| JPS5847825B2 (ja) | 1983-10-25 |
| NL7510276A (nl) | 1977-03-03 |
| FR2322452A1 (fr) | 1977-03-25 |
| DE2637753A1 (de) | 1977-03-03 |
| JPS5230154A (en) | 1977-03-07 |
| FR2322452B1 (https=) | 1980-12-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |