NL7510276A - Elektronenmikroskoop. - Google Patents

Elektronenmikroskoop.

Info

Publication number
NL7510276A
NL7510276A NL7510276A NL7510276A NL7510276A NL 7510276 A NL7510276 A NL 7510276A NL 7510276 A NL7510276 A NL 7510276A NL 7510276 A NL7510276 A NL 7510276A NL 7510276 A NL7510276 A NL 7510276A
Authority
NL
Netherlands
Prior art keywords
microskop
electronic
electronic microskop
Prior art date
Application number
NL7510276A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7510276A priority Critical patent/NL7510276A/xx
Priority to DE19762637753 priority patent/DE2637753A1/de
Priority to US05/717,193 priority patent/US4095104A/en
Priority to CA259,926A priority patent/CA1061477A/en
Priority to GB3573076A priority patent/GB1563014A/en
Priority to JP51102218A priority patent/JPS5847825B2/ja
Priority to FR7626413A priority patent/FR2322452A1/fr
Publication of NL7510276A publication Critical patent/NL7510276A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7510276A 1975-09-01 1975-09-01 Elektronenmikroskoop. NL7510276A (nl)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL7510276A NL7510276A (nl) 1975-09-01 1975-09-01 Elektronenmikroskoop.
DE19762637753 DE2637753A1 (de) 1975-09-01 1976-08-21 Elektronenmikroskop
US05/717,193 US4095104A (en) 1975-09-01 1976-08-24 Electron microscope
CA259,926A CA1061477A (en) 1975-09-01 1976-08-26 Electron microscope
GB3573076A GB1563014A (en) 1975-09-01 1976-08-27 Electron microscope
JP51102218A JPS5847825B2 (ja) 1975-09-01 1976-08-28 電子顕微鏡
FR7626413A FR2322452A1 (fr) 1975-09-01 1976-09-01 Microscope electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7510276A NL7510276A (nl) 1975-09-01 1975-09-01 Elektronenmikroskoop.

Publications (1)

Publication Number Publication Date
NL7510276A true NL7510276A (nl) 1977-03-03

Family

ID=19824390

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7510276A NL7510276A (nl) 1975-09-01 1975-09-01 Elektronenmikroskoop.

Country Status (6)

Country Link
JP (1) JPS5847825B2 (xx)
CA (1) CA1061477A (xx)
DE (1) DE2637753A1 (xx)
FR (1) FR2322452A1 (xx)
GB (1) GB1563014A (xx)
NL (1) NL7510276A (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
EP1049131B1 (en) 1999-03-31 2008-08-13 Advantest Corporation Particle beam apparatus for tilted observation of a specimen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL245866A (xx) * 1958-11-29
JPS5623272B2 (xx) * 1973-11-19 1981-05-29

Also Published As

Publication number Publication date
JPS5230154A (en) 1977-03-07
GB1563014A (en) 1980-03-19
CA1061477A (en) 1979-08-28
JPS5847825B2 (ja) 1983-10-25
FR2322452A1 (fr) 1977-03-25
DE2637753A1 (de) 1977-03-03
FR2322452B1 (xx) 1980-12-12

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Legal Events

Date Code Title Description
BV The patent application has lapsed