JPS5845534A - 静電容量型圧力センサ - Google Patents

静電容量型圧力センサ

Info

Publication number
JPS5845534A
JPS5845534A JP56144502A JP14450281A JPS5845534A JP S5845534 A JPS5845534 A JP S5845534A JP 56144502 A JP56144502 A JP 56144502A JP 14450281 A JP14450281 A JP 14450281A JP S5845534 A JPS5845534 A JP S5845534A
Authority
JP
Japan
Prior art keywords
alumina
pressure sensor
diaphragm
thermal expansion
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56144502A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113524B2 (enExample
Inventor
Toru Ishida
徹 石田
Osamu Makino
治 牧野
Seiji Oikawa
及川　清司
Jun Yasuda
純 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56144502A priority Critical patent/JPS5845534A/ja
Publication of JPS5845534A publication Critical patent/JPS5845534A/ja
Publication of JPH0113524B2 publication Critical patent/JPH0113524B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP56144502A 1981-09-11 1981-09-11 静電容量型圧力センサ Granted JPS5845534A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56144502A JPS5845534A (ja) 1981-09-11 1981-09-11 静電容量型圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56144502A JPS5845534A (ja) 1981-09-11 1981-09-11 静電容量型圧力センサ

Publications (2)

Publication Number Publication Date
JPS5845534A true JPS5845534A (ja) 1983-03-16
JPH0113524B2 JPH0113524B2 (enExample) 1989-03-07

Family

ID=15363847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56144502A Granted JPS5845534A (ja) 1981-09-11 1981-09-11 静電容量型圧力センサ

Country Status (1)

Country Link
JP (1) JPS5845534A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (enExample) * 1985-10-11 1987-04-18
JPS63265128A (ja) * 1986-12-12 1988-11-01 Fuji Electric Co Ltd 静電容量式圧力センサにおけるギヤツプ形成方法
EP1153276A4 (en) * 1999-01-22 2002-06-19 Setra Systems Inc TEMPERATURE COMPENSATED TRANSDUCER

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262944U (enExample) * 1985-10-11 1987-04-18
JPS63265128A (ja) * 1986-12-12 1988-11-01 Fuji Electric Co Ltd 静電容量式圧力センサにおけるギヤツプ形成方法
EP1153276A4 (en) * 1999-01-22 2002-06-19 Setra Systems Inc TEMPERATURE COMPENSATED TRANSDUCER

Also Published As

Publication number Publication date
JPH0113524B2 (enExample) 1989-03-07

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