JPS5845515A - 面位置検出制御装置 - Google Patents

面位置検出制御装置

Info

Publication number
JPS5845515A
JPS5845515A JP14242081A JP14242081A JPS5845515A JP S5845515 A JPS5845515 A JP S5845515A JP 14242081 A JP14242081 A JP 14242081A JP 14242081 A JP14242081 A JP 14242081A JP S5845515 A JPS5845515 A JP S5845515A
Authority
JP
Japan
Prior art keywords
image
light
optical system
reflected
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14242081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6345523B2 (OSRAM
Inventor
Yoshisada Hayamizu
早水　良定
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP14242081A priority Critical patent/JPS5845515A/ja
Publication of JPS5845515A publication Critical patent/JPS5845515A/ja
Publication of JPS6345523B2 publication Critical patent/JPS6345523B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284—Electromagnetic waves
    • G01F23/292—Light, e.g. infrared or ultraviolet

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP14242081A 1981-09-11 1981-09-11 面位置検出制御装置 Granted JPS5845515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14242081A JPS5845515A (ja) 1981-09-11 1981-09-11 面位置検出制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14242081A JPS5845515A (ja) 1981-09-11 1981-09-11 面位置検出制御装置

Publications (2)

Publication Number Publication Date
JPS5845515A true JPS5845515A (ja) 1983-03-16
JPS6345523B2 JPS6345523B2 (OSRAM) 1988-09-09

Family

ID=15314910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14242081A Granted JPS5845515A (ja) 1981-09-11 1981-09-11 面位置検出制御装置

Country Status (1)

Country Link
JP (1) JPS5845515A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103707A (ja) * 1989-09-19 1991-04-30 Rohm Co Ltd 微少変位測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103707A (ja) * 1989-09-19 1991-04-30 Rohm Co Ltd 微少変位測定装置

Also Published As

Publication number Publication date
JPS6345523B2 (OSRAM) 1988-09-09

Similar Documents

Publication Publication Date Title
JP2913984B2 (ja) 傾斜角測定装置
KR20040032816A (ko) 반사 및 반사굴절 영상장치
JPS6355002B2 (OSRAM)
EP1030160A1 (en) Optical position sensor
JP3384038B2 (ja) 面位置検出光学装置
JPH08152308A (ja) 共焦点光学装置
JPS61111402A (ja) 位置検出装置
JP3379336B2 (ja) 光学的位置検出装置
US4549802A (en) Focus detection apparatus
JP3085961B2 (ja) 長尺物観察用光学装置
JPS5845515A (ja) 面位置検出制御装置
JP2003083723A (ja) ３次元形状測定光学系
US7577348B2 (en) Focus detection apparatus and optical apparatus
JP2007010951A (ja) 焦点検出装置及び撮像装置
JP3290705B2 (ja) 共焦点光学系
JPH0145882B2 (OSRAM)
JP3337528B2 (ja) 測距装置
RU2039347C1 (ru) Устройство для определения взаимного расположения элементов пространственной структуры из эластичного материала
JP2757541B2 (ja) 焦点検出装置及びそれを備えた観察装置
EP3751327A1 (en) Method of and apparatus for monitoring a focus state of a microscope
JP3179162B2 (ja) 焦点検出装置
JP2534789B2 (ja) 合焦検出光学系
JP2636017B2 (ja) 傾き検出ヘッド
JPH06273664A (ja) 焦点検出装置
JPS5942508A (ja) 焦点位置検出装置