JPS5842473A - サ−マルヘツド作製方法 - Google Patents
サ−マルヘツド作製方法Info
- Publication number
- JPS5842473A JPS5842473A JP56140654A JP14065481A JPS5842473A JP S5842473 A JPS5842473 A JP S5842473A JP 56140654 A JP56140654 A JP 56140654A JP 14065481 A JP14065481 A JP 14065481A JP S5842473 A JPS5842473 A JP S5842473A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- layer
- wear
- phase method
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 239000012808 vapor phase Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 5
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 16
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 7
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 abstract description 6
- 229930195733 hydrocarbon Natural products 0.000 abstract description 4
- 239000004215 Carbon black (E152) Substances 0.000 abstract description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 abstract description 3
- 239000005977 Ethylene Substances 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 3
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 3
- 239000001294 propane Substances 0.000 abstract description 3
- 238000010891 electric arc Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 abstract 6
- 239000011241 protective layer Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 239000003575 carbonaceous material Substances 0.000 description 2
- -1 ethylene ( 0 Chemical class 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 description 2
- YQEZLKZALYSWHR-UHFFFAOYSA-N Ketamine Chemical compound C=1C=CC=C(Cl)C=1C1(NC)CCCCC1=O YQEZLKZALYSWHR-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56140654A JPS5842473A (ja) | 1981-09-07 | 1981-09-07 | サ−マルヘツド作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56140654A JPS5842473A (ja) | 1981-09-07 | 1981-09-07 | サ−マルヘツド作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5842473A true JPS5842473A (ja) | 1983-03-11 |
| JPS6241476B2 JPS6241476B2 (enrdf_load_stackoverflow) | 1987-09-03 |
Family
ID=15273666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56140654A Granted JPS5842473A (ja) | 1981-09-07 | 1981-09-07 | サ−マルヘツド作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842473A (enrdf_load_stackoverflow) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959472A (ja) * | 1982-09-29 | 1984-04-05 | Pentel Kk | サ−マルヘツド |
| DE3525913A1 (de) * | 1984-07-20 | 1986-01-30 | Canon K.K., Tokio/Tokyo | Aufzeichnungskopf |
| JPS61189957A (ja) * | 1985-02-19 | 1986-08-23 | Matsushita Electric Ind Co Ltd | サ−マルヘツド |
| DE3609975A1 (de) * | 1985-03-25 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermoaufzeichnungskopf |
| DE3609493A1 (de) * | 1985-03-23 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermischer schreibkopf |
| JPS6237902A (ja) * | 1985-08-13 | 1987-02-18 | 松下電器産業株式会社 | サ−マルヘツド |
| JPS634068A (ja) * | 1986-06-23 | 1988-01-09 | Nec Corp | ダイヤモンド状カ−ボン膜 |
| US4783369A (en) * | 1985-03-23 | 1988-11-08 | Canon Kabushiki Kaisha | Heat-generating resistor and heat-generating resistance element using same |
| US4804974A (en) * | 1985-03-23 | 1989-02-14 | Canon Kabushiki Kaisha | Thermal recording head |
| US4847639A (en) * | 1985-06-10 | 1989-07-11 | Canon Kabushiki Kaisha | Liquid jet recording head and recording system incorporating the same |
| US4870388A (en) * | 1985-03-22 | 1989-09-26 | Canon Kabushiki Kaisha | Heat-generating resistor and heat-generating resistance element using same |
| US6046758A (en) * | 1998-03-10 | 2000-04-04 | Diamonex, Incorporated | Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11472906B2 (en) | 2018-06-06 | 2022-10-18 | Mitsubishi Gas Chemical Company, Inc. | Actinic-ray-curable resin composition, gas-barrier film, and multilayer structure |
-
1981
- 1981-09-07 JP JP56140654A patent/JPS5842473A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959472A (ja) * | 1982-09-29 | 1984-04-05 | Pentel Kk | サ−マルヘツド |
| DE3525913A1 (de) * | 1984-07-20 | 1986-01-30 | Canon K.K., Tokio/Tokyo | Aufzeichnungskopf |
| JPS61189957A (ja) * | 1985-02-19 | 1986-08-23 | Matsushita Electric Ind Co Ltd | サ−マルヘツド |
| US4870388A (en) * | 1985-03-22 | 1989-09-26 | Canon Kabushiki Kaisha | Heat-generating resistor and heat-generating resistance element using same |
| US4804974A (en) * | 1985-03-23 | 1989-02-14 | Canon Kabushiki Kaisha | Thermal recording head |
| DE3609493A1 (de) * | 1985-03-23 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermischer schreibkopf |
| US4845513A (en) * | 1985-03-23 | 1989-07-04 | Canon Kabushiki Kaisha | Thermal recording head |
| US4783369A (en) * | 1985-03-23 | 1988-11-08 | Canon Kabushiki Kaisha | Heat-generating resistor and heat-generating resistance element using same |
| DE3609975A1 (de) * | 1985-03-25 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermoaufzeichnungskopf |
| US4983993A (en) * | 1985-03-25 | 1991-01-08 | Canon Kabushiki Kaisha | Thermal recording head |
| US4847639A (en) * | 1985-06-10 | 1989-07-11 | Canon Kabushiki Kaisha | Liquid jet recording head and recording system incorporating the same |
| JPS6237902A (ja) * | 1985-08-13 | 1987-02-18 | 松下電器産業株式会社 | サ−マルヘツド |
| JPS634068A (ja) * | 1986-06-23 | 1988-01-09 | Nec Corp | ダイヤモンド状カ−ボン膜 |
| US6046758A (en) * | 1998-03-10 | 2000-04-04 | Diamonex, Incorporated | Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6241476B2 (enrdf_load_stackoverflow) | 1987-09-03 |
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