JPS5835918A - 石英反応管及びその製造方法 - Google Patents
石英反応管及びその製造方法Info
- Publication number
- JPS5835918A JPS5835918A JP13517181A JP13517181A JPS5835918A JP S5835918 A JPS5835918 A JP S5835918A JP 13517181 A JP13517181 A JP 13517181A JP 13517181 A JP13517181 A JP 13517181A JP S5835918 A JPS5835918 A JP S5835918A
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- tube
- transparent
- transparent quartz
- crystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13517181A JPS5835918A (ja) | 1981-08-28 | 1981-08-28 | 石英反応管及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13517181A JPS5835918A (ja) | 1981-08-28 | 1981-08-28 | 石英反応管及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5835918A true JPS5835918A (ja) | 1983-03-02 |
JPH0445212B2 JPH0445212B2 (fr) | 1992-07-24 |
Family
ID=15145489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13517181A Granted JPS5835918A (ja) | 1981-08-28 | 1981-08-28 | 石英反応管及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5835918A (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5126871U (fr) * | 1974-08-16 | 1976-02-27 |
-
1981
- 1981-08-28 JP JP13517181A patent/JPS5835918A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5126871U (fr) * | 1974-08-16 | 1976-02-27 |
Also Published As
Publication number | Publication date |
---|---|
JPH0445212B2 (fr) | 1992-07-24 |
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