JPS5833309A - すべり波共振器 - Google Patents
すべり波共振器Info
- Publication number
- JPS5833309A JPS5833309A JP13173981A JP13173981A JPS5833309A JP S5833309 A JPS5833309 A JP S5833309A JP 13173981 A JP13173981 A JP 13173981A JP 13173981 A JP13173981 A JP 13173981A JP S5833309 A JPS5833309 A JP S5833309A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- wave
- resonator
- interdigital
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000001902 propagating effect Effects 0.000 claims abstract description 3
- 239000013078 crystal Substances 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 11
- 239000010453 quartz Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 230000032683 aging Effects 0.000 abstract description 2
- 238000011109 contamination Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 3
- 238000010897 surface acoustic wave method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 229940015273 buspar Drugs 0.000 description 1
- QWCRAEMEVRGPNT-UHFFFAOYSA-N buspirone Chemical compound C1C(=O)N(CCCCN2CCN(CC2)C=2N=CC=CN=2)C(=O)CC21CCCC2 QWCRAEMEVRGPNT-UHFFFAOYSA-N 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13173981A JPS5833309A (ja) | 1981-08-21 | 1981-08-21 | すべり波共振器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13173981A JPS5833309A (ja) | 1981-08-21 | 1981-08-21 | すべり波共振器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5833309A true JPS5833309A (ja) | 1983-02-26 |
JPH0134411B2 JPH0134411B2 (enrdf_load_stackoverflow) | 1989-07-19 |
Family
ID=15065054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13173981A Granted JPS5833309A (ja) | 1981-08-21 | 1981-08-21 | すべり波共振器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5833309A (enrdf_load_stackoverflow) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0340509A (ja) * | 1989-07-06 | 1991-02-21 | Murata Mfg Co Ltd | バルク波装置 |
WO2005099089A1 (ja) | 2004-04-01 | 2005-10-20 | Toyo Communication Equipment Co., Ltd. | 弾性表面波デバイス |
WO2007004661A1 (ja) * | 2005-06-30 | 2007-01-11 | Epson Toyocom Corporation | 弾性表面波デバイス |
EP1679794A3 (en) * | 2005-01-06 | 2007-07-04 | Epson Toyocom Corporation | Surface acoustic wave device |
EP1675260A3 (en) * | 2004-12-03 | 2007-08-15 | Epson Toyocom Corporation | Surface acoustic wave device |
US7843112B2 (en) | 2005-09-30 | 2010-11-30 | Seiko Epson Corporation | Surface acoustic wave device, module device, oscillation circuit, and method for manufacturing surface acoustic wave device |
US8305162B2 (en) | 2009-02-27 | 2012-11-06 | Seiko Epson Corporation | Surface acoustic wave resonator and surface acoustic wave oscillator |
US8471434B2 (en) | 2010-08-26 | 2013-06-25 | Seiko Epson Corporation | Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus |
US8476984B2 (en) | 2010-12-07 | 2013-07-02 | Seiko Epson Corporation | Vibration device, oscillator, and electronic apparatus |
US8598766B2 (en) | 2010-12-03 | 2013-12-03 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8692439B2 (en) | 2010-08-26 | 2014-04-08 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device |
US8928432B2 (en) | 2010-08-26 | 2015-01-06 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8933612B2 (en) | 2009-02-27 | 2015-01-13 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US9048806B2 (en) | 2010-09-09 | 2015-06-02 | Seiko Epson Corporation | Surface acoustic wave device, electronic apparatus, and sensor apparatus |
US9088263B2 (en) | 2010-06-17 | 2015-07-21 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007049288A (ja) * | 2005-08-08 | 2007-02-22 | Seiko Epson Corp | 複数段接続縦結合多重モード弾性表面波フィルタ |
JP4582150B2 (ja) * | 2008-01-11 | 2010-11-17 | エプソントヨコム株式会社 | 弾性表面波デバイスとこれを用いたモジュール装置又は発振回路 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435657A (en) * | 1977-08-26 | 1979-03-15 | Hitachi Ltd | Surface slip wave resonator filter |
JPS55105426A (en) * | 1979-02-06 | 1980-08-13 | Fujitsu Ltd | Elastic surface wave device |
-
1981
- 1981-08-21 JP JP13173981A patent/JPS5833309A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435657A (en) * | 1977-08-26 | 1979-03-15 | Hitachi Ltd | Surface slip wave resonator filter |
JPS55105426A (en) * | 1979-02-06 | 1980-08-13 | Fujitsu Ltd | Elastic surface wave device |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0340509A (ja) * | 1989-07-06 | 1991-02-21 | Murata Mfg Co Ltd | バルク波装置 |
EP1732216A4 (en) * | 2004-04-01 | 2008-07-30 | Epson Toyocom Corp | SURFACE WAVE COMPONENT |
WO2005099089A1 (ja) | 2004-04-01 | 2005-10-20 | Toyo Communication Equipment Co., Ltd. | 弾性表面波デバイス |
US7589451B2 (en) | 2004-04-01 | 2009-09-15 | Epson Toyocom Corporation | Surface acoustic wave device |
EP1926210A3 (en) * | 2004-12-03 | 2013-04-17 | Seiko Epson Corporation | Surface acoustic wave device |
EP1675260A3 (en) * | 2004-12-03 | 2007-08-15 | Epson Toyocom Corporation | Surface acoustic wave device |
US7382217B2 (en) | 2004-12-03 | 2008-06-03 | Epson Toyocom Corporation | Surface acoustic wave device |
US7463119B2 (en) | 2005-01-06 | 2008-12-09 | Epson Toyocom Corporation | Surface acoustic wave device |
EP1679794A3 (en) * | 2005-01-06 | 2007-07-04 | Epson Toyocom Corporation | Surface acoustic wave device |
WO2007004661A1 (ja) * | 2005-06-30 | 2007-01-11 | Epson Toyocom Corporation | 弾性表面波デバイス |
US7843112B2 (en) | 2005-09-30 | 2010-11-30 | Seiko Epson Corporation | Surface acoustic wave device, module device, oscillation circuit, and method for manufacturing surface acoustic wave device |
US8018122B2 (en) | 2005-09-30 | 2011-09-13 | Epson Toyocom Corporation | Surface acoustic wave device, module device, oscillation circuit, and method for manufacturing surface acoustic wave device |
US8502625B2 (en) | 2009-02-27 | 2013-08-06 | Seiko Epson Corporation | Surface acoustic wave resonator and surface acoustic wave oscillator |
US9762207B2 (en) | 2009-02-27 | 2017-09-12 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US8305162B2 (en) | 2009-02-27 | 2012-11-06 | Seiko Epson Corporation | Surface acoustic wave resonator and surface acoustic wave oscillator |
US8933612B2 (en) | 2009-02-27 | 2015-01-13 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US8952596B2 (en) | 2009-02-27 | 2015-02-10 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US9537464B2 (en) | 2010-06-17 | 2017-01-03 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US9088263B2 (en) | 2010-06-17 | 2015-07-21 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8471434B2 (en) | 2010-08-26 | 2013-06-25 | Seiko Epson Corporation | Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus |
US8692439B2 (en) | 2010-08-26 | 2014-04-08 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device |
US8928432B2 (en) | 2010-08-26 | 2015-01-06 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US9048806B2 (en) | 2010-09-09 | 2015-06-02 | Seiko Epson Corporation | Surface acoustic wave device, electronic apparatus, and sensor apparatus |
US8791621B2 (en) | 2010-12-03 | 2014-07-29 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8598766B2 (en) | 2010-12-03 | 2013-12-03 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8476984B2 (en) | 2010-12-07 | 2013-07-02 | Seiko Epson Corporation | Vibration device, oscillator, and electronic apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0134411B2 (enrdf_load_stackoverflow) | 1989-07-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5833309A (ja) | すべり波共振器 | |
JP4757860B2 (ja) | 弾性表面波機能素子 | |
JPH10233645A (ja) | 弾性表面波装置 | |
JPWO2018097016A1 (ja) | 弾性波デバイス | |
WO1996010293A1 (fr) | Dispositif a ondes acoustiques de surface | |
KR100232753B1 (ko) | 탄탈(Ta) 박막 또는 텅스텐(W) 박막을 포함한 러브파 장치 | |
JP4109877B2 (ja) | 弾性表面波機能素子 | |
JP2003124780A (ja) | 弾性表面波装置 | |
JPH08288788A (ja) | 弾性表面波素子 | |
JPWO2008114715A1 (ja) | ラム波型弾性波素子 | |
JP4059147B2 (ja) | 弾性表面波共振子 | |
JPS63135010A (ja) | 弾性表面波共振子 | |
US3401283A (en) | Piezoelectric resonator | |
JP3255502B2 (ja) | 高安定弾性表面波素子 | |
JP2001267880A (ja) | Saw共振子 | |
RU2643501C1 (ru) | Резонатор на поверхностных акустических волнах | |
JP4465464B2 (ja) | ラム波型弾性波素子 | |
JP3341699B2 (ja) | 端面反射型表面波装置 | |
CN114079436B (zh) | 弹性波元件 | |
JP2011171887A (ja) | ラム波型共振子および発振器 | |
Zaitsev et al. | Composite lateral electric field excited piezoelectric resonator | |
JP4158289B2 (ja) | 表面弾性波素子の製造方法 | |
KR820002039B1 (ko) | 후활 수정 진동자(厚滑水晶振動子) | |
JP2011171888A (ja) | ラム波型共振子および発振器 | |
JP2015084535A (ja) | トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 |