JPS5832266Y2 - 薄板体の立替具 - Google Patents

薄板体の立替具

Info

Publication number
JPS5832266Y2
JPS5832266Y2 JP12262779U JP12262779U JPS5832266Y2 JP S5832266 Y2 JPS5832266 Y2 JP S5832266Y2 JP 12262779 U JP12262779 U JP 12262779U JP 12262779 U JP12262779 U JP 12262779U JP S5832266 Y2 JPS5832266 Y2 JP S5832266Y2
Authority
JP
Japan
Prior art keywords
tool
thin plate
pitch
wafer
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12262779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5640656U (cg-RX-API-DMAC7.html
Inventor
将昭 貞森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12262779U priority Critical patent/JPS5832266Y2/ja
Publication of JPS5640656U publication Critical patent/JPS5640656U/ja
Application granted granted Critical
Publication of JPS5832266Y2 publication Critical patent/JPS5832266Y2/ja
Expired legal-status Critical Current

Links

JP12262779U 1979-09-05 1979-09-05 薄板体の立替具 Expired JPS5832266Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12262779U JPS5832266Y2 (ja) 1979-09-05 1979-09-05 薄板体の立替具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12262779U JPS5832266Y2 (ja) 1979-09-05 1979-09-05 薄板体の立替具

Publications (2)

Publication Number Publication Date
JPS5640656U JPS5640656U (cg-RX-API-DMAC7.html) 1981-04-15
JPS5832266Y2 true JPS5832266Y2 (ja) 1983-07-18

Family

ID=29354664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12262779U Expired JPS5832266Y2 (ja) 1979-09-05 1979-09-05 薄板体の立替具

Country Status (1)

Country Link
JP (1) JPS5832266Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192020A (en) * 1981-05-20 1982-11-26 Mitsubishi Electric Corp Stacking tool for thin plate body

Also Published As

Publication number Publication date
JPS5640656U (cg-RX-API-DMAC7.html) 1981-04-15

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