JPS5831403Y2 - 半導体装置の製造装置 - Google Patents

半導体装置の製造装置

Info

Publication number
JPS5831403Y2
JPS5831403Y2 JP6200476U JP6200476U JPS5831403Y2 JP S5831403 Y2 JPS5831403 Y2 JP S5831403Y2 JP 6200476 U JP6200476 U JP 6200476U JP 6200476 U JP6200476 U JP 6200476U JP S5831403 Y2 JPS5831403 Y2 JP S5831403Y2
Authority
JP
Japan
Prior art keywords
diffusion
diffusion source
semiconductor substrate
substrate
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6200476U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52152676U (enExample
Inventor
壮吉 山岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP6200476U priority Critical patent/JPS5831403Y2/ja
Publication of JPS52152676U publication Critical patent/JPS52152676U/ja
Application granted granted Critical
Publication of JPS5831403Y2 publication Critical patent/JPS5831403Y2/ja
Expired legal-status Critical Current

Links

JP6200476U 1976-05-14 1976-05-14 半導体装置の製造装置 Expired JPS5831403Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6200476U JPS5831403Y2 (ja) 1976-05-14 1976-05-14 半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6200476U JPS5831403Y2 (ja) 1976-05-14 1976-05-14 半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS52152676U JPS52152676U (enExample) 1977-11-18
JPS5831403Y2 true JPS5831403Y2 (ja) 1983-07-12

Family

ID=28523982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6200476U Expired JPS5831403Y2 (ja) 1976-05-14 1976-05-14 半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS5831403Y2 (enExample)

Also Published As

Publication number Publication date
JPS52152676U (enExample) 1977-11-18

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