JPS5824436Y2 - 半導体基板熱処理用ボ−ト - Google Patents

半導体基板熱処理用ボ−ト

Info

Publication number
JPS5824436Y2
JPS5824436Y2 JP1978116302U JP11630278U JPS5824436Y2 JP S5824436 Y2 JPS5824436 Y2 JP S5824436Y2 JP 1978116302 U JP1978116302 U JP 1978116302U JP 11630278 U JP11630278 U JP 11630278U JP S5824436 Y2 JPS5824436 Y2 JP S5824436Y2
Authority
JP
Japan
Prior art keywords
heat treatment
furnace
boat
outside air
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978116302U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5532096U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
修 長野
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP1978116302U priority Critical patent/JPS5824436Y2/ja
Publication of JPS5532096U publication Critical patent/JPS5532096U/ja
Application granted granted Critical
Publication of JPS5824436Y2 publication Critical patent/JPS5824436Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP1978116302U 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト Expired JPS5824436Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978116302U JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978116302U JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Publications (2)

Publication Number Publication Date
JPS5532096U JPS5532096U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-03-01
JPS5824436Y2 true JPS5824436Y2 (ja) 1983-05-25

Family

ID=29068722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978116302U Expired JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Country Status (1)

Country Link
JP (1) JPS5824436Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130418A (ja) * 1983-01-17 1984-07-27 Nec Kyushu Ltd 加熱処理システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918673Y2 (ja) * 1977-06-23 1984-05-30 日本電気ホームエレクトロニクス株式会社 半導体装置用熱処理炉
JPS54184078U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-06-19 1979-12-27

Also Published As

Publication number Publication date
JPS5532096U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-03-01

Similar Documents

Publication Publication Date Title
JPS5824436Y2 (ja) 半導体基板熱処理用ボ−ト
US7994067B2 (en) Semiconductor manufacturing equipment with an open-topped cassette apparatus
JPS6446937A (en) Manufacture of semiconductor device
JP2688653B2 (ja) 半導体加圧酸化方法
JPH04350927A (ja) 半導体ウェーハの熱処理装置
JPS6367729A (ja) 半導体熱処理装置
JPS5961930A (ja) ウエハ処理装置
JPH0779093B2 (ja) 半導体ウェハの熱処理方法
JPH01295415A (ja) ボートローディング方法
JP3110406B2 (ja) 研磨装置及び研磨方法
JPS6298624A (ja) 熱処理炉
JPH04302454A (ja) 半導体製造装置
JPS60233828A (ja) 処理装置
JPH0631718Y2 (ja) ボ−ト搬送装置
JPS60194527A (ja) 熱処理装置
JPH05275361A (ja) 熱処理装置
JPS60211913A (ja) 処理装置
JPS60117739A (ja) 熱処理装置
JPH0234914A (ja) 半導体加熱処理装置
JP3698510B2 (ja) パターン形成方法およびこの方法に用いる冷却装置
JPH04252024A (ja) 半導体製造装置
JPS63244734A (ja) 酸化拡散装置
JPS6079715A (ja) 拡散炉
JPH04345018A (ja) 半導体装置の製造装置
JPH0654788B2 (ja) ウエハ移送装置