JPS5823704B2 - 電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置 - Google Patents

電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置

Info

Publication number
JPS5823704B2
JPS5823704B2 JP1186076A JP1186076A JPS5823704B2 JP S5823704 B2 JPS5823704 B2 JP S5823704B2 JP 1186076 A JP1186076 A JP 1186076A JP 1186076 A JP1186076 A JP 1186076A JP S5823704 B2 JPS5823704 B2 JP S5823704B2
Authority
JP
Japan
Prior art keywords
electrode
radiation beam
uniformity
intensity
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1186076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS51102800A (ja
Inventor
ルネ・ボー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CGR MEV SA
Original Assignee
CGR MEV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CGR MEV SA filed Critical CGR MEV SA
Publication of JPS51102800A publication Critical patent/JPS51102800A/ja
Publication of JPS5823704B2 publication Critical patent/JPS5823704B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24455—Transmitted particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP1186076A 1975-02-07 1976-02-07 電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置 Expired JPS5823704B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7503798A FR2300414A2 (fr) 1975-02-07 1975-02-07 Dispositif pour le controle de la p

Publications (2)

Publication Number Publication Date
JPS51102800A JPS51102800A (ja) 1976-09-10
JPS5823704B2 true JPS5823704B2 (ja) 1983-05-17

Family

ID=9150889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1186076A Expired JPS5823704B2 (ja) 1975-02-07 1976-02-07 電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置

Country Status (7)

Country Link
JP (1) JPS5823704B2 (fr)
CA (1) CA1067624A (fr)
CH (1) CH588086A5 (fr)
DE (1) DE2604672C2 (fr)
FR (1) FR2300414A2 (fr)
GB (1) GB1558601A (fr)
NL (1) NL7601175A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610001U (ja) * 1992-07-14 1994-02-08 正雄 宮前 台 車

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804037A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.
US4347547A (en) * 1980-05-22 1982-08-31 Siemens Medical Laboratories, Inc. Energy interlock system for a linear accelerator
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133318A5 (fr) * 1971-04-16 1972-11-24 Thomson Csf
FR2215701B1 (fr) * 1973-01-26 1978-10-27 Cgr Mev

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610001U (ja) * 1992-07-14 1994-02-08 正雄 宮前 台 車

Also Published As

Publication number Publication date
DE2604672A1 (de) 1976-08-19
FR2300414A2 (fr) 1976-09-03
JPS51102800A (ja) 1976-09-10
FR2300414B2 (fr) 1978-12-01
CA1067624A (fr) 1979-12-04
CH588086A5 (fr) 1977-05-31
NL7601175A (nl) 1976-08-10
GB1558601A (en) 1980-01-09
DE2604672C2 (de) 1984-09-27

Similar Documents

Publication Publication Date Title
US6690022B2 (en) Ion beam incidence angle and beam divergence monitor
JPS63503340A (ja) イオン注入のための注入量の測定及び均一性のモニタリング装置
US4206355A (en) System for monitoring the position intensity uniformity and directivity of a beam of ionizing radiation
JP2599591B2 (ja) 電子放出素子特性測定装置
JPH01501508A (ja) イオンビームセントロイド位置付けのための方法及び装置
JPS5823704B2 (ja) 電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置
CN108008435B (zh) 医用加速器的剂量监测系统及监测电路
US3008051A (en) Radiation meter
JP6335376B1 (ja) 四重極型質量分析計及びその感度低下の判定方法
JPH079460B2 (ja) 粒子線測定用モニタ装置
JP2769375B2 (ja) イオン注入装置
JP3052436B2 (ja) イオン処理装置
JP2687422B2 (ja) イオン処理装置
JP2825575B2 (ja) 位置有感型分子線束強度測定装置
JP3184592B2 (ja) 電子ビーム装置
JPS6233246Y2 (fr)
JPS61193351A (ja) 帯電防止制御装置
JPH056675B2 (fr)
JPH0737232Y2 (ja) イオンビーム照射装置
JP2697932B2 (ja) 真空度測定装置
JPH02267847A (ja) イオン注入装置
JPH07151531A (ja) 金属箔厚の測定装置および方法
JPH0341402Y2 (fr)
JPH0526549Y2 (fr)
JPH0627649Y2 (ja) イオン処理装置