CA1067624A - Systeme de controle de la position, de l'intensite, de l'uniformite et de la directivite d'un faisceau de radiation ionisante - Google Patents

Systeme de controle de la position, de l'intensite, de l'uniformite et de la directivite d'un faisceau de radiation ionisante

Info

Publication number
CA1067624A
CA1067624A CA245,763A CA245763A CA1067624A CA 1067624 A CA1067624 A CA 1067624A CA 245763 A CA245763 A CA 245763A CA 1067624 A CA1067624 A CA 1067624A
Authority
CA
Canada
Prior art keywords
electrode
electrodes
elements
chambers
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA245,763A
Other languages
English (en)
Inventor
Rene Boux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CGR MEV SA
Original Assignee
CGR MEV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CGR MEV SA filed Critical CGR MEV SA
Application granted granted Critical
Publication of CA1067624A publication Critical patent/CA1067624A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24455—Transmitted particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
CA245,763A 1975-02-07 1976-02-06 Systeme de controle de la position, de l'intensite, de l'uniformite et de la directivite d'un faisceau de radiation ionisante Expired CA1067624A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7503798A FR2300414A2 (fr) 1975-02-07 1975-02-07 Dispositif pour le controle de la p

Publications (1)

Publication Number Publication Date
CA1067624A true CA1067624A (fr) 1979-12-04

Family

ID=9150889

Family Applications (1)

Application Number Title Priority Date Filing Date
CA245,763A Expired CA1067624A (fr) 1975-02-07 1976-02-06 Systeme de controle de la position, de l'intensite, de l'uniformite et de la directivite d'un faisceau de radiation ionisante

Country Status (7)

Country Link
JP (1) JPS5823704B2 (fr)
CA (1) CA1067624A (fr)
CH (1) CH588086A5 (fr)
DE (1) DE2604672C2 (fr)
FR (1) FR2300414A2 (fr)
GB (1) GB1558601A (fr)
NL (1) NL7601175A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804037A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.
US4347547A (en) * 1980-05-22 1982-08-31 Siemens Medical Laboratories, Inc. Energy interlock system for a linear accelerator
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope
JPH0610001U (ja) * 1992-07-14 1994-02-08 正雄 宮前 台 車

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133318A5 (fr) * 1971-04-16 1972-11-24 Thomson Csf
FR2215701B1 (fr) * 1973-01-26 1978-10-27 Cgr Mev

Also Published As

Publication number Publication date
DE2604672A1 (de) 1976-08-19
FR2300414A2 (fr) 1976-09-03
JPS51102800A (ja) 1976-09-10
JPS5823704B2 (ja) 1983-05-17
FR2300414B2 (fr) 1978-12-01
CH588086A5 (fr) 1977-05-31
NL7601175A (nl) 1976-08-10
GB1558601A (en) 1980-01-09
DE2604672C2 (de) 1984-09-27

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