JPS58223293A - 薄膜ｅｌ素子 - Google Patents
薄膜ｅｌ素子Info
- Publication number
- JPS58223293A JPS58223293A JP57105989A JP10598982A JPS58223293A JP S58223293 A JPS58223293 A JP S58223293A JP 57105989 A JP57105989 A JP 57105989A JP 10598982 A JP10598982 A JP 10598982A JP S58223293 A JPS58223293 A JP S58223293A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- dielectric layer
- light
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 19
- 239000010408 film Substances 0.000 claims description 15
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 230000005684 electric field Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000008188 pellet Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57105989A JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57105989A JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58223293A true JPS58223293A (ja) | 1983-12-24 |
| JPS6143840B2 JPS6143840B2 (enrdf_load_stackoverflow) | 1986-09-30 |
Family
ID=14422133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57105989A Granted JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58223293A (enrdf_load_stackoverflow) |
-
1982
- 1982-06-18 JP JP57105989A patent/JPS58223293A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143840B2 (enrdf_load_stackoverflow) | 1986-09-30 |
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