JPS58218132A - 半導体ウエ−ハ特性検査処理方法 - Google Patents
半導体ウエ−ハ特性検査処理方法Info
- Publication number
- JPS58218132A JPS58218132A JP57086956A JP8695682A JPS58218132A JP S58218132 A JPS58218132 A JP S58218132A JP 57086956 A JP57086956 A JP 57086956A JP 8695682 A JP8695682 A JP 8695682A JP S58218132 A JPS58218132 A JP S58218132A
- Authority
- JP
- Japan
- Prior art keywords
- memory
- inspection
- semiconductor
- marking
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10P74/00—
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57086956A JPS58218132A (ja) | 1982-05-21 | 1982-05-21 | 半導体ウエ−ハ特性検査処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57086956A JPS58218132A (ja) | 1982-05-21 | 1982-05-21 | 半導体ウエ−ハ特性検査処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58218132A true JPS58218132A (ja) | 1983-12-19 |
| JPH0312463B2 JPH0312463B2 (OSRAM) | 1991-02-20 |
Family
ID=13901319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57086956A Granted JPS58218132A (ja) | 1982-05-21 | 1982-05-21 | 半導体ウエ−ハ特性検査処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58218132A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211956A (ja) * | 1984-04-06 | 1985-10-24 | Tokyo Seimitsu Co Ltd | プロ−ビングマシン |
| JPS62293124A (ja) * | 1986-06-12 | 1987-12-19 | Matsushita Electric Ind Co Ltd | プリント基板の検査装置 |
-
1982
- 1982-05-21 JP JP57086956A patent/JPS58218132A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211956A (ja) * | 1984-04-06 | 1985-10-24 | Tokyo Seimitsu Co Ltd | プロ−ビングマシン |
| JPS62293124A (ja) * | 1986-06-12 | 1987-12-19 | Matsushita Electric Ind Co Ltd | プリント基板の検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312463B2 (OSRAM) | 1991-02-20 |
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