JPS58214092A - 超高純度ガスの純度維持方法 - Google Patents
超高純度ガスの純度維持方法Info
- Publication number
- JPS58214092A JPS58214092A JP9588982A JP9588982A JPS58214092A JP S58214092 A JPS58214092 A JP S58214092A JP 9588982 A JP9588982 A JP 9588982A JP 9588982 A JP9588982 A JP 9588982A JP S58214092 A JPS58214092 A JP S58214092A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cylinder
- purity
- plating
- maintaining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000007747 plating Methods 0.000 claims abstract description 20
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052737 gold Inorganic materials 0.000 claims abstract description 13
- 239000010931 gold Substances 0.000 claims abstract description 13
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 9
- 239000010935 stainless steel Substances 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 39
- 239000000463 material Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 230000009972 noncorrosive effect Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000617 Mangalloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000001637 plasma atomic emission spectroscopy Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
- F17C1/10—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge with provision for protection against corrosion, e.g. due to gaseous acid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0104—Shape cylindrical
- F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
- F17C2203/0634—Materials for walls or layers thereof
- F17C2203/0636—Metals
- F17C2203/0639—Steels
- F17C2203/0643—Stainless steels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0107—Single phase
- F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Electroplating Methods And Accessories (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9588982A JPS58214092A (ja) | 1982-06-04 | 1982-06-04 | 超高純度ガスの純度維持方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9588982A JPS58214092A (ja) | 1982-06-04 | 1982-06-04 | 超高純度ガスの純度維持方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58214092A true JPS58214092A (ja) | 1983-12-13 |
| JPH0246837B2 JPH0246837B2 (OSRAM) | 1990-10-17 |
Family
ID=14149874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9588982A Granted JPS58214092A (ja) | 1982-06-04 | 1982-06-04 | 超高純度ガスの純度維持方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58214092A (OSRAM) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61168517A (ja) * | 1985-01-22 | 1986-07-30 | Mitsui Toatsu Chem Inc | モノシランの充填方法 |
| US6503771B1 (en) | 1983-08-22 | 2003-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor photoelectrically sensitive device |
| US7038238B1 (en) | 1985-05-07 | 2006-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a non-single crystalline semiconductor layer |
| KR100924987B1 (ko) | 2009-05-29 | 2009-11-04 | 주식회사 세창엠아이 | 암모니아 가스용기의 제조방법 |
| JP2016042047A (ja) * | 2014-08-15 | 2016-03-31 | アルメックスコーセイ株式会社 | 気体流量制御装置、気体流量制御弁および気体流量計 |
| WO2017175562A1 (ja) * | 2016-04-05 | 2017-10-12 | 関東電化工業株式会社 | 材料、この材料を用いた保存容器、この保存容器に取り付けられるバルブ、並びに、ＣｌＦの保存方法、ＣｌＦの保存容器の使用方法 |
| WO2024127901A1 (ja) * | 2022-12-15 | 2024-06-20 | セントラル硝子株式会社 | 液化ガス入り容器および液化ガス入り容器の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5096912A (OSRAM) * | 1973-12-22 | 1975-08-01 |
-
1982
- 1982-06-04 JP JP9588982A patent/JPS58214092A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5096912A (OSRAM) * | 1973-12-22 | 1975-08-01 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6503771B1 (en) | 1983-08-22 | 2003-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor photoelectrically sensitive device |
| JPS61168517A (ja) * | 1985-01-22 | 1986-07-30 | Mitsui Toatsu Chem Inc | モノシランの充填方法 |
| US7038238B1 (en) | 1985-05-07 | 2006-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a non-single crystalline semiconductor layer |
| KR100924987B1 (ko) | 2009-05-29 | 2009-11-04 | 주식회사 세창엠아이 | 암모니아 가스용기의 제조방법 |
| JP2016042047A (ja) * | 2014-08-15 | 2016-03-31 | アルメックスコーセイ株式会社 | 気体流量制御装置、気体流量制御弁および気体流量計 |
| WO2017175562A1 (ja) * | 2016-04-05 | 2017-10-12 | 関東電化工業株式会社 | 材料、この材料を用いた保存容器、この保存容器に取り付けられるバルブ、並びに、ＣｌＦの保存方法、ＣｌＦの保存容器の使用方法 |
| CN108884548A (zh) * | 2016-04-05 | 2018-11-23 | 关东电化工业株式会社 | 材料、使用该材料的保存容器、安装于该保存容器的阀以及ClF的保存方法、ClF容器的使用方法 |
| JPWO2017175562A1 (ja) * | 2016-04-05 | 2019-02-14 | 関東電化工業株式会社 | 材料、この材料を用いた保存容器、この保存容器に取り付けられるバルブ、並びに、ＣｌＦの保存方法、ＣｌＦの保存容器の使用方法 |
| US10982811B2 (en) | 2016-04-05 | 2021-04-20 | Kanto Denka Kogyo, Co., Ltd. | Material, storage container using the material, valve attached to the storage container, method of storing ClF and method of using ClF storage container |
| TWI786043B (zh) * | 2016-04-05 | 2022-12-11 | 日商關東電化工業股份有限公司 | 保存容器 |
| WO2024127901A1 (ja) * | 2022-12-15 | 2024-06-20 | セントラル硝子株式会社 | 液化ガス入り容器および液化ガス入り容器の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0246837B2 (OSRAM) | 1990-10-17 |
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