JPS58190038A - インライン型半導体製造装置 - Google Patents
インライン型半導体製造装置Info
- Publication number
- JPS58190038A JPS58190038A JP7284582A JP7284582A JPS58190038A JP S58190038 A JPS58190038 A JP S58190038A JP 7284582 A JP7284582 A JP 7284582A JP 7284582 A JP7284582 A JP 7284582A JP S58190038 A JPS58190038 A JP S58190038A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- stage
- groove
- moved
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 235000012431 wafers Nutrition 0.000 abstract description 9
- 239000011295 pitch Substances 0.000 abstract 1
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284582A JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284582A JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58190038A true JPS58190038A (ja) | 1983-11-05 |
| JPS6253947B2 JPS6253947B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-12 |
Family
ID=13501125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7284582A Granted JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58190038A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117745A (ja) * | 1983-11-30 | 1985-06-25 | Canon Hanbai Kk | ウエハ−カセツト位置決め用ガイド部材 |
| NL2006113C2 (en) * | 2011-02-01 | 2012-08-02 | Otb Solar Bv | Water inspection system. |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102212421B1 (ko) * | 2019-08-05 | 2021-02-04 | 고려대학교 산학협력단 | 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법 |
-
1982
- 1982-04-30 JP JP7284582A patent/JPS58190038A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117745A (ja) * | 1983-11-30 | 1985-06-25 | Canon Hanbai Kk | ウエハ−カセツト位置決め用ガイド部材 |
| NL2006113C2 (en) * | 2011-02-01 | 2012-08-02 | Otb Solar Bv | Water inspection system. |
| WO2012105837A1 (en) * | 2011-02-01 | 2012-08-09 | Otb Solar B.V. | Wafer inspection system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6253947B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-12 |