JPS6253947B2 - - Google Patents

Info

Publication number
JPS6253947B2
JPS6253947B2 JP7284582A JP7284582A JPS6253947B2 JP S6253947 B2 JPS6253947 B2 JP S6253947B2 JP 7284582 A JP7284582 A JP 7284582A JP 7284582 A JP7284582 A JP 7284582A JP S6253947 B2 JPS6253947 B2 JP S6253947B2
Authority
JP
Japan
Prior art keywords
carrier
stage
groove
grooves
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7284582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58190038A (ja
Inventor
Yukihisa Taguchi
Shinsui Saruwatari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP7284582A priority Critical patent/JPS58190038A/ja
Publication of JPS58190038A publication Critical patent/JPS58190038A/ja
Publication of JPS6253947B2 publication Critical patent/JPS6253947B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP7284582A 1982-04-30 1982-04-30 インライン型半導体製造装置 Granted JPS58190038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7284582A JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7284582A JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Publications (2)

Publication Number Publication Date
JPS58190038A JPS58190038A (ja) 1983-11-05
JPS6253947B2 true JPS6253947B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-12

Family

ID=13501125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7284582A Granted JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Country Status (1)

Country Link
JP (1) JPS58190038A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021025247A1 (ko) * 2019-08-05 2021-02-11 고려대학교 산학협력단 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117745A (ja) * 1983-11-30 1985-06-25 Canon Hanbai Kk ウエハ−カセツト位置決め用ガイド部材
NL2006113C2 (en) * 2011-02-01 2012-08-02 Otb Solar Bv Water inspection system.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021025247A1 (ko) * 2019-08-05 2021-02-11 고려대학교 산학협력단 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법

Also Published As

Publication number Publication date
JPS58190038A (ja) 1983-11-05

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