JPS58186941A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS58186941A
JPS58186941A JP57068676A JP6867682A JPS58186941A JP S58186941 A JPS58186941 A JP S58186941A JP 57068676 A JP57068676 A JP 57068676A JP 6867682 A JP6867682 A JP 6867682A JP S58186941 A JPS58186941 A JP S58186941A
Authority
JP
Japan
Prior art keywords
expansion
reaction gas
electrode
reaction chamber
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57068676A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343773B2 (enExample
Inventor
Norio Kanai
金井　謙雄
Noriaki Yamamoto
山本　則明
Tsunehiko Tsubone
恒彦 坪根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57068676A priority Critical patent/JPS58186941A/ja
Publication of JPS58186941A publication Critical patent/JPS58186941A/ja
Publication of JPH0343773B2 publication Critical patent/JPH0343773B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W95/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP57068676A 1982-04-26 1982-04-26 半導体製造装置 Granted JPS58186941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57068676A JPS58186941A (ja) 1982-04-26 1982-04-26 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57068676A JPS58186941A (ja) 1982-04-26 1982-04-26 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS58186941A true JPS58186941A (ja) 1983-11-01
JPH0343773B2 JPH0343773B2 (enExample) 1991-07-03

Family

ID=13380551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57068676A Granted JPS58186941A (ja) 1982-04-26 1982-04-26 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS58186941A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100610316B1 (ko) 2004-12-28 2006-08-09 동부일렉트로닉스 주식회사 반도체 웨이퍼 이온 주입 장치용 인듐 가스 공급 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162295A (en) * 1978-06-13 1979-12-22 Ulvac Corp Gas introducing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162295A (en) * 1978-06-13 1979-12-22 Ulvac Corp Gas introducing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100610316B1 (ko) 2004-12-28 2006-08-09 동부일렉트로닉스 주식회사 반도체 웨이퍼 이온 주입 장치용 인듐 가스 공급 장치

Also Published As

Publication number Publication date
JPH0343773B2 (enExample) 1991-07-03

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