JPS58182529A - 半導体圧力変換装置 - Google Patents

半導体圧力変換装置

Info

Publication number
JPS58182529A
JPS58182529A JP6509382A JP6509382A JPS58182529A JP S58182529 A JPS58182529 A JP S58182529A JP 6509382 A JP6509382 A JP 6509382A JP 6509382 A JP6509382 A JP 6509382A JP S58182529 A JPS58182529 A JP S58182529A
Authority
JP
Japan
Prior art keywords
pressure
resistance
bridge circuit
semiconductor
semiconductor gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6509382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419494B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
白水　俊次
Ryuzo Noda
龍三 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6509382A priority Critical patent/JPS58182529A/ja
Publication of JPS58182529A publication Critical patent/JPS58182529A/ja
Publication of JPH0419494B2 publication Critical patent/JPH0419494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP6509382A 1982-04-19 1982-04-19 半導体圧力変換装置 Granted JPS58182529A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6509382A JPS58182529A (ja) 1982-04-19 1982-04-19 半導体圧力変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6509382A JPS58182529A (ja) 1982-04-19 1982-04-19 半導体圧力変換装置

Publications (2)

Publication Number Publication Date
JPS58182529A true JPS58182529A (ja) 1983-10-25
JPH0419494B2 JPH0419494B2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=13276957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6509382A Granted JPS58182529A (ja) 1982-04-19 1982-04-19 半導体圧力変換装置

Country Status (1)

Country Link
JP (1) JPS58182529A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253279A (ja) * 1984-05-29 1985-12-13 Toyota Central Res & Dev Lab Inc 半導体歪み測定器
JPS6122223A (ja) * 1984-07-10 1986-01-30 Sumitomo Electric Ind Ltd 歪センサ
JPS61212740A (ja) * 1985-03-18 1986-09-20 Yokogawa Electric Corp 半導体圧力変換器
JPS61215935A (ja) * 1985-03-22 1986-09-25 Yokogawa Electric Corp 半導体圧力変換器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253279A (ja) * 1984-05-29 1985-12-13 Toyota Central Res & Dev Lab Inc 半導体歪み測定器
JPS6122223A (ja) * 1984-07-10 1986-01-30 Sumitomo Electric Ind Ltd 歪センサ
JPS61212740A (ja) * 1985-03-18 1986-09-20 Yokogawa Electric Corp 半導体圧力変換器
JPS61215935A (ja) * 1985-03-22 1986-09-25 Yokogawa Electric Corp 半導体圧力変換器

Also Published As

Publication number Publication date
JPH0419494B2 (enrdf_load_stackoverflow) 1992-03-30

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