JPS58182246A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58182246A
JPS58182246A JP57065858A JP6585882A JPS58182246A JP S58182246 A JPS58182246 A JP S58182246A JP 57065858 A JP57065858 A JP 57065858A JP 6585882 A JP6585882 A JP 6585882A JP S58182246 A JPS58182246 A JP S58182246A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
film
heat treatment
thin film
sheet resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57065858A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127581B2 (enExample
Inventor
Masakatsu Yoshida
吉田　正勝
Toshiyuki Yokoyama
敏之 横山
Takamichi Takebayashi
竹林　孝路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP57065858A priority Critical patent/JPS58182246A/ja
Publication of JPS58182246A publication Critical patent/JPS58182246A/ja
Publication of JPH0127581B2 publication Critical patent/JPH0127581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP57065858A 1982-04-19 1982-04-19 半導体装置の製造方法 Granted JPS58182246A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57065858A JPS58182246A (ja) 1982-04-19 1982-04-19 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57065858A JPS58182246A (ja) 1982-04-19 1982-04-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58182246A true JPS58182246A (ja) 1983-10-25
JPH0127581B2 JPH0127581B2 (enExample) 1989-05-30

Family

ID=13299124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57065858A Granted JPS58182246A (ja) 1982-04-19 1982-04-19 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58182246A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04237417A (ja) * 1991-01-21 1992-08-25 Kubota Corp 根菜類の掘取機
US5338693A (en) * 1987-01-08 1994-08-16 International Rectifier Corporation Process for manufacture of radiation resistant power MOSFET and radiation resistant power MOSFET
US5831318A (en) * 1996-07-25 1998-11-03 International Rectifier Corporation Radhard mosfet with thick gate oxide and deep channel region

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234193A (en) * 1975-09-12 1977-03-15 Hitachi Ltd Turbine control system for eccs of nuclear reactor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234193A (en) * 1975-09-12 1977-03-15 Hitachi Ltd Turbine control system for eccs of nuclear reactor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5338693A (en) * 1987-01-08 1994-08-16 International Rectifier Corporation Process for manufacture of radiation resistant power MOSFET and radiation resistant power MOSFET
JPH04237417A (ja) * 1991-01-21 1992-08-25 Kubota Corp 根菜類の掘取機
US5831318A (en) * 1996-07-25 1998-11-03 International Rectifier Corporation Radhard mosfet with thick gate oxide and deep channel region

Also Published As

Publication number Publication date
JPH0127581B2 (enExample) 1989-05-30

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