JPS58182140U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS58182140U
JPS58182140U JP7967482U JP7967482U JPS58182140U JP S58182140 U JPS58182140 U JP S58182140U JP 7967482 U JP7967482 U JP 7967482U JP 7967482 U JP7967482 U JP 7967482U JP S58182140 U JPS58182140 U JP S58182140U
Authority
JP
Japan
Prior art keywords
vapor deposition
sample
magnetic field
deposition equipment
rotating magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7967482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329230Y2 (enrdf_load_stackoverflow
Inventor
正木　俊行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7967482U priority Critical patent/JPS58182140U/ja
Publication of JPS58182140U publication Critical patent/JPS58182140U/ja
Application granted granted Critical
Publication of JPS6329230Y2 publication Critical patent/JPS6329230Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
JP7967482U 1982-05-29 1982-05-29 蒸着装置 Granted JPS58182140U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7967482U JPS58182140U (ja) 1982-05-29 1982-05-29 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7967482U JPS58182140U (ja) 1982-05-29 1982-05-29 蒸着装置

Publications (2)

Publication Number Publication Date
JPS58182140U true JPS58182140U (ja) 1983-12-05
JPS6329230Y2 JPS6329230Y2 (enrdf_load_stackoverflow) 1988-08-05

Family

ID=30088852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7967482U Granted JPS58182140U (ja) 1982-05-29 1982-05-29 蒸着装置

Country Status (1)

Country Link
JP (1) JPS58182140U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216425A (ja) * 2008-03-07 2009-09-24 Mitsui Chemical Analysis & Consulting Service Inc 異物分析用試料および異物の分析方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216425A (ja) * 2008-03-07 2009-09-24 Mitsui Chemical Analysis & Consulting Service Inc 異物分析用試料および異物の分析方法

Also Published As

Publication number Publication date
JPS6329230Y2 (enrdf_load_stackoverflow) 1988-08-05

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