JPS58177807U - Substrate thickness measuring device - Google Patents
Substrate thickness measuring deviceInfo
- Publication number
- JPS58177807U JPS58177807U JP5165683U JP5165683U JPS58177807U JP S58177807 U JPS58177807 U JP S58177807U JP 5165683 U JP5165683 U JP 5165683U JP 5165683 U JP5165683 U JP 5165683U JP S58177807 U JPS58177807 U JP S58177807U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- measuring device
- thickness measuring
- substrate thickness
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す数、第２図ａはマスク
基板の厚さと光検知器からの信号の関係を示す図、第２
図すはマスク基板の厚さと割算回路からの信号の関係を
示す図、第３図は信号の処理法を説明するための図、第
４図はマスクの移動機構を示す図である。
図において、１はレーザーチューブ、２はレーザービー
ム、３はビームスプリッタ、４はガルバノミラ−１５，
７は集光用レンズ、６は被検査マスク基板、８は光検知
器、９はモニター用検知器、１０は低域通過フィルター
、ｌｌａ、ｌｌｂはレベル判定回路、１２はインバータ
回路、１３はアンド回路、１４はランプ、１５はレール
、１６はホルダー、１７はワイヤー、１８．１９はプー
リ、２０．２１は接続具、２２は割算回路、Ｍｌ、 Ｍ
２はモータ、ＳＷはマイクロスイッチである。
Ａ＝ ３Ｍｇ ２ｄ才戸
−
−」
づ”Fig. 1 is a number showing an embodiment of the present invention, Fig. 2a is a diagram showing the relationship between the thickness of the mask substrate and the signal from the photodetector, and Fig. 2
3 is a diagram showing the relationship between the thickness of the mask substrate and the signal from the division circuit, FIG. 3 is a diagram for explaining the signal processing method, and FIG. 4 is a diagram showing the mask moving mechanism. In the figure, 1 is a laser tube, 2 is a laser beam, 3 is a beam splitter, 4 is a galvano mirror 15,
7 is a condensing lens, 6 is a mask substrate to be inspected, 8 is a photodetector, 9 is a monitor detector, 10 is a low-pass filter, lla and llb are level judgment circuits, 12 is an inverter circuit, 13 is an AND Circuit, 14 is a lamp, 15 is a rail, 16 is a holder, 17 is a wire, 18.19 is a pulley, 20.21 is a connector, 22 is a division circuit, Ml, M
2 is a motor, and SW is a microswitch. A= 3Mg 2d Saito
− −” zu”
Claims (1)
光ビームを検知する光検知器、該検知器からの該通過光
量に応じた信号と、照射光ビーム量に応じた信号との比
をとる割算回路、低域フィルタを通過させた割算回路か
らの出力信号のレベルを判定して該基板の厚さを測定す
る回路を設けて成る基板の厚さ測定装置。A means for scanning a substrate with a light beam, a photodetector for detecting the light beam that has passed through the substrate, and a ratio between a signal from the detector corresponding to the amount of the passing light and a signal corresponding to the amount of the irradiated light beam. A substrate thickness measuring device comprising a divider circuit and a circuit that measures the thickness of the substrate by determining the level of an output signal from the divider circuit passed through a low-pass filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165683U JPS58177807U (en) | 1983-04-07 | 1983-04-07 | Substrate thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165683U JPS58177807U (en) | 1983-04-07 | 1983-04-07 | Substrate thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58177807U true JPS58177807U (en) | 1983-11-28 |
Family
ID=30062364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5165683U Pending JPS58177807U (en) | 1983-04-07 | 1983-04-07 | Substrate thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58177807U (en) |
-
1983
- 1983-04-07 JP JP5165683U patent/JPS58177807U/en active Pending
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