JPS5849333U - Defect detection device - Google Patents

Defect detection device

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Publication number
JPS5849333U
JPS5849333U JP14533681U JP14533681U JPS5849333U JP S5849333 U JPS5849333 U JP S5849333U JP 14533681 U JP14533681 U JP 14533681U JP 14533681 U JP14533681 U JP 14533681U JP S5849333 U JPS5849333 U JP S5849333U
Authority
JP
Japan
Prior art keywords
detection device
defect detection
light source
light
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14533681U
Other languages
Japanese (ja)
Inventor
康之 後藤
彰 南
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP14533681U priority Critical patent/JPS5849333U/en
Publication of JPS5849333U publication Critical patent/JPS5849333U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例構成図、第２図ａ。 ｂは信号波形図である。 １・・・・・・光源、２・・・・・・偏光ビームスプリ
ング、３λ ・・・・・・Ｔ板、４・・・・・・凹レンズ、５・・間
整形板、６・・・・・・対物レンズ、７・・・・・・被
検体、８．　８’・・曲検知器。FIG. 1 is a configuration diagram of an embodiment of the present invention, and FIG. 2a. b is a signal waveform diagram. 1... Light source, 2... Polarizing beam spring, 3λ... T plate, 4... Concave lens, 5... Interval shaping plate, 6... . . . Objective lens, 7 . . . Subject, 8. 8'... Song detector.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光源と、該光源の光束を被検体に導く光学系と゛を具え
、前記被検体表面に照射された前記光源の光の反射光強
度分布より前記被検体表面の欠陥を検出するようにした
欠陥検出装置において前記光学系が前記光源の光束の強
度分布が一様となるべく前記光束を整形する手段を有す
ることを特徴とする欠陥検出装置。A defect detection device comprising: a light source; and an optical system that guides the light beam of the light source to a test object; and detecting defects on the surface of the test object based on the reflected light intensity distribution of the light from the light source irradiated onto the surface of the test object. A defect detection device characterized in that the optical system has means for shaping the light beam of the light source so that the intensity distribution of the light beam is uniform.
JP14533681U 1981-09-30 1981-09-30 Defect detection device Pending JPS5849333U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14533681U JPS5849333U (en) 1981-09-30 1981-09-30 Defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14533681U JPS5849333U (en) 1981-09-30 1981-09-30 Defect detection device

Publications (1)

Publication Number Publication Date
JPS5849333U true JPS5849333U (en) 1983-04-02

Family

ID=29938270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14533681U Pending JPS5849333U (en) 1981-09-30 1981-09-30 Defect detection device

Country Status (1)

Country Link
JP (1) JPS5849333U (en)

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