JPS59185609U

JPS59185609U - Surface roughness measuring device

Info

Publication number: JPS59185609U
Application number: JP8018583U
Authority: JP
Inventors: 隈井　文生; 佐伯　邦雄; 順一安部; 宮野　光男
Original assignee: 株式会社安川電機
Priority date: 1983-05-30
Filing date: 1983-05-30
Publication date: 1984-12-10

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図ａは、本考案の一実施例の光学系の構成図、第１
図ｂ１第４図ａ、　ｂ、　ｃ、　ｄは、第１図ａの変形
の構成図、第２図は、第１図ａの概略説明図、第３図は
、等師表面形状曲線グラフ、第５図ａは、本考案の一実
施例の電気系のブロック図、第５図すは、第５図ａのタ
イミングを示すチャート、第５図Ｃは、第５図ａにより
得られた表面あらさを示すグラフ、第６図ａは、第５図
ａの変形゛ノフロック図、第６図すは、第６図ａのチャ
ートである。１・・・・・・測定面、２・・・・・・レーザ光源、３
・・・用コンデンサレンズ、４・・・・・・受光器、４
２・間・弁別器、４３・・・・・・カウンタ、４８・・
・・・・積分器、５０・・・・・・アナログメータ。Figure 1a is a configuration diagram of an optical system according to an embodiment of the present invention.
Figure b1 Figures 4 a, b, c, and d are configuration diagrams of modifications of Figure 1 a, Figure 2 is a schematic explanatory diagram of Figure 1 a, Figure 3 is an isometric surface shape curve graph, FIG. 5a is a block diagram of an electrical system of an embodiment of the present invention, FIG. 5 is a chart showing the timing of FIG. 5a, and FIG. 5C is a surface obtained by FIG. 5a. The graph showing the roughness, FIG. 6a, is a modified noflock diagram of FIG. 5a, and FIG. 6 is the chart of FIG. 6a. 1...Measurement surface, 2...Laser light source, 3
Condenser lens for... 4... Receiver, 4
2. Discriminator, 43... Counter, 48...
...Integrator, 50...Analog meter.

Claims

[Scope of utility model registration request]

(1) A device including means for generating a laser beam and irradiating it onto a measurement surface, and a light receiver arranged so that specularly reflected light of the laser beam irradiated onto the measurement surface does not enter, the laser beam A surface roughness measuring device that scans the measurement surface on the measurement surface, and detects diffusely reflected light from the measurement surface with the light receiver.

(2) Photoelectrically convert the detected diffusely reflected light, and
Surface roughness measurement according to claim 1 of the utility model registration, characterized in that the photoelectrically converted signal of is discriminated by a predetermined threshold value, and the number of waveforms of the signal having a value equal to or greater than the threshold value is counted. Device.

(3) The surface roughness measuring device according to claim 1, which is characterized in that the detected diffusely reflected light is photoelectrically converted, and the photoelectrically converted signal is integrated and displayed in analog form.