JPS5942955U

JPS5942955U - Object surface defect detection device

Info

Publication number: JPS5942955U
Application number: JP14052082U
Authority: JP
Inventors: 雅良島田
Original assignee: 株式会社東芝
Priority date: 1982-09-16
Filing date: 1982-09-16
Publication date: 1984-03-21

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は、従来の物体表面の欠陥検出装置の概略構成図
；第２図は、第１図に示す光電変換器から出力された信
号を欠陥検出波形として検出するためのブロック回路図
；第３図は、第２図に示す夫々該当する個所で得られる
波形図；第４図は、被検査物体の表面構造によって異な
るレーザ光の異なる走査入力波形図；第５図は、この考
案の一実施例を示す物体表面の欠陥検出装置の概略構成
図；第６図は、第５図に示す光電変換器から出力された
信号を欠陥検出波形として検出するためのブロック図；
及び第７図は第６図に示す夫々該当する個所で得られる
波形図である。１、　２．　３・・・レーザ光発振装置、１４・・・ス
タートパルス検出器、６・・・光電変換器、１７・・・
記憶回路、２０・・・演算回路、２２・・・比較回路。FIG. 1 is a schematic configuration diagram of a conventional object surface defect detection device; FIG. 2 is a block circuit diagram for detecting a signal output from the photoelectric converter shown in FIG. 1 as a defect detection waveform; Figure 3 is a waveform diagram obtained at each corresponding point shown in Figure 2; Figure 4 is a diagram of different scanning input waveforms of laser beams that differ depending on the surface structure of the object to be inspected; Figure 5 is a diagram of one part of this invention. A schematic configuration diagram of an object surface defect detection device showing an embodiment; FIG. 6 is a block diagram for detecting a signal output from the photoelectric converter shown in FIG. 5 as a defect detection waveform;
and FIG. 7 are waveform diagrams obtained at corresponding locations shown in FIG. 6, respectively. 1, 2. 3... Laser beam oscillation device, 14... Start pulse detector, 6... Photoelectric converter, 17...
Memory circuit, 20... Arithmetic circuit, 22... Comparison circuit.

Claims

[Scope of utility model registration request]

a laser beam oscillator for scanning the surface of the object to be inspected with a laser beam; a start pulse detector for detecting the start of the scanning; a photoelectric converter for the reflected laser beam scanned on the surface of the object to be inspected; a storage circuit that inputs and stores surface information of a standard sample having no defects in advance through the photoelectric converter starting from a start pulse from the start pulse detector; A surface information signal obtained by scanning the surface with a laser beam through the photoelectric converter and a standard waveform signal of the standard sample outputted from the storage circuit in synchronization with scanning with a start pulse as a starting point are inputted. A defect on the surface of an object, comprising: an arithmetic circuit that calculates and outputs a normalized scanning waveform signal; and a comparison circuit that compares the output from the arithmetic circuit with a reference signal to obtain a waveform signal that reproduces surface defect information. Detection device.