JPS58172207A - 窒化けい素の製造方法 - Google Patents

窒化けい素の製造方法

Info

Publication number
JPS58172207A
JPS58172207A JP57054179A JP5417982A JPS58172207A JP S58172207 A JPS58172207 A JP S58172207A JP 57054179 A JP57054179 A JP 57054179A JP 5417982 A JP5417982 A JP 5417982A JP S58172207 A JPS58172207 A JP S58172207A
Authority
JP
Japan
Prior art keywords
silicon
silicon nitride
halide
metal
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57054179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156161B2 (enExample
Inventor
Mitsuo Umemura
梅村　光雄
Yoshihiro Kubota
芳宏 久保田
Ryoji Iwai
良二 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP57054179A priority Critical patent/JPS58172207A/ja
Publication of JPS58172207A publication Critical patent/JPS58172207A/ja
Publication of JPS6156161B2 publication Critical patent/JPS6156161B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP57054179A 1982-04-01 1982-04-01 窒化けい素の製造方法 Granted JPS58172207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Publications (2)

Publication Number Publication Date
JPS58172207A true JPS58172207A (ja) 1983-10-11
JPS6156161B2 JPS6156161B2 (enExample) 1986-12-01

Family

ID=12963311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57054179A Granted JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Country Status (1)

Country Link
JP (1) JPS58172207A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107908A (ja) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd 焼結性に優れた窒化珪素粉末の製造法
FR2616768A1 (fr) * 1987-06-22 1988-12-23 Basf Ag Nitrure de silicium amorphe en poudre, sa preparation et son utilisation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130300A (en) * 1977-04-20 1978-11-14 Kagaku Gijutsucho Mukizai Method of synthesizing silicon nitride or silicon imide
JPS54134098A (en) * 1978-04-11 1979-10-18 Asahi Glass Co Ltd Preparing silicon nitride

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130300A (en) * 1977-04-20 1978-11-14 Kagaku Gijutsucho Mukizai Method of synthesizing silicon nitride or silicon imide
JPS54134098A (en) * 1978-04-11 1979-10-18 Asahi Glass Co Ltd Preparing silicon nitride

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107908A (ja) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd 焼結性に優れた窒化珪素粉末の製造法
FR2616768A1 (fr) * 1987-06-22 1988-12-23 Basf Ag Nitrure de silicium amorphe en poudre, sa preparation et son utilisation

Also Published As

Publication number Publication date
JPS6156161B2 (enExample) 1986-12-01

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