JPS6156161B2 - - Google Patents

Info

Publication number
JPS6156161B2
JPS6156161B2 JP57054179A JP5417982A JPS6156161B2 JP S6156161 B2 JPS6156161 B2 JP S6156161B2 JP 57054179 A JP57054179 A JP 57054179A JP 5417982 A JP5417982 A JP 5417982A JP S6156161 B2 JPS6156161 B2 JP S6156161B2
Authority
JP
Japan
Prior art keywords
silicon
silicon nitride
metal
reaction
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57054179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58172207A (ja
Inventor
Mitsuo Umemura
Yoshihiro Kubota
Ryoji Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP57054179A priority Critical patent/JPS58172207A/ja
Publication of JPS58172207A publication Critical patent/JPS58172207A/ja
Publication of JPS6156161B2 publication Critical patent/JPS6156161B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP57054179A 1982-04-01 1982-04-01 窒化けい素の製造方法 Granted JPS58172207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Publications (2)

Publication Number Publication Date
JPS58172207A JPS58172207A (ja) 1983-10-11
JPS6156161B2 true JPS6156161B2 (enExample) 1986-12-01

Family

ID=12963311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57054179A Granted JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Country Status (1)

Country Link
JP (1) JPS58172207A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107908A (ja) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd 焼結性に優れた窒化珪素粉末の製造法
DE3720572A1 (de) * 1987-06-22 1989-01-05 Basf Ag Amorphes pulverfoermiges siliciumnitrid

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130300A (en) * 1977-04-20 1978-11-14 Kagaku Gijutsucho Mukizai Method of synthesizing silicon nitride or silicon imide
JPS608967B2 (ja) * 1978-04-11 1985-03-07 旭硝子株式会社 窒化珪素を製造する方法

Also Published As

Publication number Publication date
JPS58172207A (ja) 1983-10-11

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