JPS58169788A - 真空用試料加熱装置 - Google Patents
真空用試料加熱装置Info
- Publication number
- JPS58169788A JPS58169788A JP5199982A JP5199982A JPS58169788A JP S58169788 A JPS58169788 A JP S58169788A JP 5199982 A JP5199982 A JP 5199982A JP 5199982 A JP5199982 A JP 5199982A JP S58169788 A JPS58169788 A JP S58169788A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- heater
- sample
- ceramic plate
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 16
- 238000012546 transfer Methods 0.000 claims description 11
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 2
- 206010011224 Cough Diseases 0.000 claims 1
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199982A JPS58169788A (ja) | 1982-03-30 | 1982-03-30 | 真空用試料加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199982A JPS58169788A (ja) | 1982-03-30 | 1982-03-30 | 真空用試料加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58169788A true JPS58169788A (ja) | 1983-10-06 |
| JPH0413837B2 JPH0413837B2 (enrdf_load_stackoverflow) | 1992-03-10 |
Family
ID=12902537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5199982A Granted JPS58169788A (ja) | 1982-03-30 | 1982-03-30 | 真空用試料加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58169788A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140085A (ja) * | 1986-11-29 | 1988-06-11 | Kyocera Corp | 成膜装置 |
| JPH04101381A (ja) * | 1990-08-17 | 1992-04-02 | Ngk Insulators Ltd | 半導体ウエハー加熱装置 |
| JPH05101871A (ja) * | 1991-10-09 | 1993-04-23 | Ngk Insulators Ltd | セラミツクスヒーター |
| US5306895A (en) * | 1991-03-26 | 1994-04-26 | Ngk Insulators, Ltd. | Corrosion-resistant member for chemical apparatus using halogen series corrosive gas |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254940U (enrdf_load_stackoverflow) * | 1975-10-20 | 1977-04-20 | ||
| JPS57870A (en) * | 1980-06-04 | 1982-01-05 | Matsushita Electric Ind Co Ltd | Ceramic heater |
| JPS5737436U (enrdf_load_stackoverflow) * | 1980-08-13 | 1982-02-27 |
-
1982
- 1982-03-30 JP JP5199982A patent/JPS58169788A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254940U (enrdf_load_stackoverflow) * | 1975-10-20 | 1977-04-20 | ||
| JPS57870A (en) * | 1980-06-04 | 1982-01-05 | Matsushita Electric Ind Co Ltd | Ceramic heater |
| JPS5737436U (enrdf_load_stackoverflow) * | 1980-08-13 | 1982-02-27 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140085A (ja) * | 1986-11-29 | 1988-06-11 | Kyocera Corp | 成膜装置 |
| JPH04101381A (ja) * | 1990-08-17 | 1992-04-02 | Ngk Insulators Ltd | 半導体ウエハー加熱装置 |
| US5306895A (en) * | 1991-03-26 | 1994-04-26 | Ngk Insulators, Ltd. | Corrosion-resistant member for chemical apparatus using halogen series corrosive gas |
| JPH05101871A (ja) * | 1991-10-09 | 1993-04-23 | Ngk Insulators Ltd | セラミツクスヒーター |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413837B2 (enrdf_load_stackoverflow) | 1992-03-10 |
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